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- W1544756502 abstract "We present an on-line surface measurement technique based on spectral domain low-coherenceinterferometry (SD-LCI), which can obtain a one dimensional surface profile with just one shot. This technique has an advantage over existing spectral interferometry in the large scale measurement up to 10 mm in length along the tested surface by using a cylindrical lenses based interferometic objective. In this SD-LCI system, the white light interferogram is spectrally decomposed by a spectrometer to determine the phase, which is encoded as a function of wavenumber along the chromaticity axis. After the phase of the channelled spectral signals is calculated at all wavelengthssimultaneously, the optical path difference (OPD) is determined as the slope of the phase versuswavenumber. By adding a lateral scanning or rotating the cylindrical lenses, large-scale arealmeasurement is achieved as well. The experimental details of measurements on two surface samplesare presented and discussed in this paper." @default.
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- W1544756502 date "2013-12-01" @default.
- W1544756502 modified "2023-09-26" @default.
- W1544756502 title "Spectral Domain Low- Coherence Interferometry for On-line Surface Inspection" @default.
- W1544756502 hasPublicationYear "2013" @default.
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