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- W1549243337 abstract "Abstract : The use of electromagnetic waves is proposed as an undulator in order to generate x-rays in the wavelength range required for fabrication of integrated circuits. The configuration consists of a quasi optical maser cavity through which a beam of relativistic electrons is made to propagate, spontaneously emitting x-rays of the desired energy. For 5'' silicon wafers covered with a sensitive resist such as PBS, this translates into a throughput of 26 wafers/hr using an aggressive stepper. The scaling of x-ray power with wavelength indicates that the throughput can be increased substantially using resist which are sensitive to shorter wavelength x-rays." @default.
- W1549243337 created "2016-06-24" @default.
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- W1549243337 date "1989-05-09" @default.
- W1549243337 modified "2023-09-24" @default.
- W1549243337 title "An X-Ray Source for Lithography Based on a Quasi-Optical Maser Undulator" @default.
- W1549243337 doi "https://doi.org/10.21236/ada208522" @default.
- W1549243337 hasPublicationYear "1989" @default.
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