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- W15500417 abstract "SiC films had been fabricated by radio frequency(rf)-sputtering in argon of sintered SiC. The films were found to be non-stoichiometric with carbon in excess and to be amorphous states. The dependence of electrical conductivity on temperature and on electric field was investigated. Moreover, SiC films containing Sio2 additive had been fabricated, and the effects of the impurities and of annealing on the electrical property had been studied." @default.
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- W15500417 date "1990-01-01" @default.
- W15500417 modified "2023-09-27" @default.
- W15500417 title "THE CHANGE OF ELECTRICAL CONDUCTIVITY OF SPUTTERED SIC FILM DUE TO THE RECRYSTALLIZATION" @default.
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- W15500417 doi "https://doi.org/10.1016/b978-0-444-88429-9.50041-0" @default.
- W15500417 hasPublicationYear "1990" @default.
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