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- W1550651710 abstract "In the present work, a Cz-Silicon wafer is implanted with helium ions to produce a buried porous layer, and then thermally annealed in a dry oxygen atmosphere to make oxygen transport into the cavities. The formation of the buried oxide layer in the case of internal oxidation (ITOX) of the buried po..." @default.
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- W1550651710 date "2008-01-01" @default.
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- W1550651710 title "Study of He-induced nano-cavities as sinks of oxygen for forming silicon-on-insulator" @default.
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