Matches in SemOpenAlex for { <https://semopenalex.org/work/W1550941567> ?p ?o ?g. }
- W1550941567 endingPage "206" @default.
- W1550941567 startingPage "169" @default.
- W1550941567 abstract "This chapter shows that scanning tunneling microscopes (STMs), and atomic force microscopes (AFMs), thanks to their ultimate resolution, can be viewed as the “end of the roadmap” of top-down techniques for nano-lithography. A peculiarity of scanning probe microscopes is that their resolution is of the same order of magnitude as that of matter’s elementary constituents. Consequently, patterning can take into account its discontinuous and discrete nature and enable manipulation of the nano-objects one by one, leading to the direct fabrication of devices exhibiting features that provide direct evidence of quantum mechanical effects. Lithography techniques using oxidation-reduction interactions belong to the family of local-probe lithography techniques, which has led to the greatest number of technical developments and applications. In “passive” lithography techniques, the localization possibilities of the tip are used to achieve a precise alignment on the surface and produce a local deposition by means of capillarity or of masking. Controlled Vocabulary Terms atomic force microscopy; nanolithography; scanning probe microscopy" @default.
- W1550941567 created "2016-06-24" @default.
- W1550941567 creator A5007077344 @default.
- W1550941567 date "2013-02-28" @default.
- W1550941567 modified "2023-10-17" @default.
- W1550941567 title "Lithography Techniques Using Scanning Probe Microscopy" @default.
- W1550941567 cites W1523572128 @default.
- W1550941567 cites W1780908631 @default.
- W1550941567 cites W1965702561 @default.
- W1550941567 cites W1967358946 @default.
- W1550941567 cites W1967362262 @default.
- W1550941567 cites W1969671267 @default.
- W1550941567 cites W1970588492 @default.
- W1550941567 cites W1981262899 @default.
- W1550941567 cites W1983535781 @default.
- W1550941567 cites W1986838720 @default.
- W1550941567 cites W1987015208 @default.
- W1550941567 cites W1991529848 @default.
- W1550941567 cites W1992563783 @default.
- W1550941567 cites W1994386437 @default.
- W1550941567 cites W1996816963 @default.
- W1550941567 cites W1996900454 @default.
- W1550941567 cites W2006515893 @default.
- W1550941567 cites W2007097657 @default.
- W1550941567 cites W2009177970 @default.
- W1550941567 cites W2013320877 @default.
- W1550941567 cites W2013678123 @default.
- W1550941567 cites W2014199868 @default.
- W1550941567 cites W2015498249 @default.
- W1550941567 cites W2017646543 @default.
- W1550941567 cites W2018855859 @default.
- W1550941567 cites W2021712013 @default.
- W1550941567 cites W2024483967 @default.
- W1550941567 cites W2025221226 @default.
- W1550941567 cites W2026767449 @default.
- W1550941567 cites W2026966140 @default.
- W1550941567 cites W2034016692 @default.
- W1550941567 cites W2037012265 @default.
- W1550941567 cites W2037904701 @default.
- W1550941567 cites W2039577525 @default.
- W1550941567 cites W2039861334 @default.
- W1550941567 cites W2044623985 @default.
- W1550941567 cites W2045956566 @default.
- W1550941567 cites W2048036398 @default.
- W1550941567 cites W2049596300 @default.
- W1550941567 cites W2050132318 @default.
- W1550941567 cites W2050938834 @default.
- W1550941567 cites W2051991854 @default.
- W1550941567 cites W2059229474 @default.
- W1550941567 cites W2059522380 @default.
- W1550941567 cites W2062074587 @default.
- W1550941567 cites W2068127935 @default.
- W1550941567 cites W2069601286 @default.
- W1550941567 cites W2074071059 @default.
- W1550941567 cites W2078633808 @default.
- W1550941567 cites W2081547466 @default.
- W1550941567 cites W2082687042 @default.
- W1550941567 cites W2084648753 @default.
- W1550941567 cites W2092346700 @default.
- W1550941567 cites W2093915921 @default.
- W1550941567 cites W2110167104 @default.
- W1550941567 cites W2126765907 @default.
- W1550941567 cites W2140721652 @default.
- W1550941567 cites W2506356478 @default.
- W1550941567 cites W264891673 @default.
- W1550941567 cites W3098680241 @default.
- W1550941567 cites W3099691848 @default.
- W1550941567 cites W3105447968 @default.
- W1550941567 cites W3150248096 @default.
- W1550941567 cites W4301896041 @default.
- W1550941567 doi "https://doi.org/10.1002/9781118622582.ch3" @default.
- W1550941567 hasPublicationYear "2013" @default.
- W1550941567 type Work @default.
- W1550941567 sameAs 1550941567 @default.
- W1550941567 citedByCount "2" @default.
- W1550941567 countsByYear W15509415672017 @default.
- W1550941567 countsByYear W15509415672023 @default.
- W1550941567 crossrefType "other" @default.
- W1550941567 hasAuthorship W1550941567A5007077344 @default.
- W1550941567 hasConcept C120665830 @default.
- W1550941567 hasConcept C121332964 @default.
- W1550941567 hasConcept C136525101 @default.
- W1550941567 hasConcept C142724271 @default.
- W1550941567 hasConcept C147080431 @default.
- W1550941567 hasConcept C162117346 @default.
- W1550941567 hasConcept C171250308 @default.
- W1550941567 hasConcept C179203168 @default.
- W1550941567 hasConcept C192562407 @default.
- W1550941567 hasConcept C204223013 @default.
- W1550941567 hasConcept C204787440 @default.
- W1550941567 hasConcept C36628996 @default.
- W1550941567 hasConcept C49040817 @default.
- W1550941567 hasConcept C6518042 @default.
- W1550941567 hasConcept C67649825 @default.
- W1550941567 hasConcept C71924100 @default.
- W1550941567 hasConceptScore W1550941567C120665830 @default.
- W1550941567 hasConceptScore W1550941567C121332964 @default.
- W1550941567 hasConceptScore W1550941567C136525101 @default.