Matches in SemOpenAlex for { <https://semopenalex.org/work/W1551117360> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W1551117360 endingPage "H657" @default.
- W1551117360 startingPage "H657" @default.
- W1551117360 abstract "The relatively higher etch rate of titanium silicide to silicon oxide in HF-based solution was ascribed to the strong interaction of the positively charged hydrogen with titanium, which has very low electron affinity relative to other metals. Based on the electron-transfer mechanism of dissolution, we developed the highly selective etching material (T-Block) mainly composed of fluoride salt and low dielectric constant solvent. To overcome the self-limiting nature of the T-Block material in the etch process, we devised the iterative treatment process, which is more suitable for single-wafer processing equipment. In contrast to the normal etching solution such as buffered oxide etchant or HF, T-Block did not show any kind of failure regarding dissolution even when the underlying bit-line contact was disclosed to T-Block in the wet etch process. Therefore, if T-Block is applied in a fabrication process with the 6F2 cell design, a significant enhancement of productivity through process simplification as well as production yield is expected." @default.
- W1551117360 created "2016-06-24" @default.
- W1551117360 creator A5006447061 @default.
- W1551117360 creator A5033980378 @default.
- W1551117360 creator A5037391791 @default.
- W1551117360 creator A5077616449 @default.
- W1551117360 date "2010-01-01" @default.
- W1551117360 modified "2023-09-23" @default.
- W1551117360 title "The Highly Selective Wet Etching Process of SiO[sub 2] to TiSi[sub x]" @default.
- W1551117360 cites W2002430127 @default.
- W1551117360 cites W2050904462 @default.
- W1551117360 cites W2167807744 @default.
- W1551117360 doi "https://doi.org/10.1149/1.3353202" @default.
- W1551117360 hasPublicationYear "2010" @default.
- W1551117360 type Work @default.
- W1551117360 sameAs 1551117360 @default.
- W1551117360 citedByCount "0" @default.
- W1551117360 crossrefType "journal-article" @default.
- W1551117360 hasAuthorship W1551117360A5006447061 @default.
- W1551117360 hasAuthorship W1551117360A5033980378 @default.
- W1551117360 hasAuthorship W1551117360A5037391791 @default.
- W1551117360 hasAuthorship W1551117360A5077616449 @default.
- W1551117360 hasConcept C100460472 @default.
- W1551117360 hasConcept C113196181 @default.
- W1551117360 hasConcept C121285527 @default.
- W1551117360 hasConcept C127413603 @default.
- W1551117360 hasConcept C130472188 @default.
- W1551117360 hasConcept C136525101 @default.
- W1551117360 hasConcept C142724271 @default.
- W1551117360 hasConcept C147789679 @default.
- W1551117360 hasConcept C160671074 @default.
- W1551117360 hasConcept C171250308 @default.
- W1551117360 hasConcept C179104552 @default.
- W1551117360 hasConcept C185592680 @default.
- W1551117360 hasConcept C191897082 @default.
- W1551117360 hasConcept C192562407 @default.
- W1551117360 hasConcept C204787440 @default.
- W1551117360 hasConcept C2524010 @default.
- W1551117360 hasConcept C2777210771 @default.
- W1551117360 hasConcept C2779227376 @default.
- W1551117360 hasConcept C2779851234 @default.
- W1551117360 hasConcept C33220542 @default.
- W1551117360 hasConcept C33923547 @default.
- W1551117360 hasConcept C42360764 @default.
- W1551117360 hasConcept C43617362 @default.
- W1551117360 hasConcept C49040817 @default.
- W1551117360 hasConcept C544956773 @default.
- W1551117360 hasConcept C71924100 @default.
- W1551117360 hasConcept C88380143 @default.
- W1551117360 hasConceptScore W1551117360C100460472 @default.
- W1551117360 hasConceptScore W1551117360C113196181 @default.
- W1551117360 hasConceptScore W1551117360C121285527 @default.
- W1551117360 hasConceptScore W1551117360C127413603 @default.
- W1551117360 hasConceptScore W1551117360C130472188 @default.
- W1551117360 hasConceptScore W1551117360C136525101 @default.
- W1551117360 hasConceptScore W1551117360C142724271 @default.
- W1551117360 hasConceptScore W1551117360C147789679 @default.
- W1551117360 hasConceptScore W1551117360C160671074 @default.
- W1551117360 hasConceptScore W1551117360C171250308 @default.
- W1551117360 hasConceptScore W1551117360C179104552 @default.
- W1551117360 hasConceptScore W1551117360C185592680 @default.
- W1551117360 hasConceptScore W1551117360C191897082 @default.
- W1551117360 hasConceptScore W1551117360C192562407 @default.
- W1551117360 hasConceptScore W1551117360C204787440 @default.
- W1551117360 hasConceptScore W1551117360C2524010 @default.
- W1551117360 hasConceptScore W1551117360C2777210771 @default.
- W1551117360 hasConceptScore W1551117360C2779227376 @default.
- W1551117360 hasConceptScore W1551117360C2779851234 @default.
- W1551117360 hasConceptScore W1551117360C33220542 @default.
- W1551117360 hasConceptScore W1551117360C33923547 @default.
- W1551117360 hasConceptScore W1551117360C42360764 @default.
- W1551117360 hasConceptScore W1551117360C43617362 @default.
- W1551117360 hasConceptScore W1551117360C49040817 @default.
- W1551117360 hasConceptScore W1551117360C544956773 @default.
- W1551117360 hasConceptScore W1551117360C71924100 @default.
- W1551117360 hasConceptScore W1551117360C88380143 @default.
- W1551117360 hasIssue "6" @default.
- W1551117360 hasLocation W15511173601 @default.
- W1551117360 hasOpenAccess W1551117360 @default.
- W1551117360 hasPrimaryLocation W15511173601 @default.
- W1551117360 hasRelatedWork W1497161545 @default.
- W1551117360 hasRelatedWork W1980475310 @default.
- W1551117360 hasRelatedWork W1984409202 @default.
- W1551117360 hasRelatedWork W1993940870 @default.
- W1551117360 hasRelatedWork W2000975590 @default.
- W1551117360 hasRelatedWork W2064091327 @default.
- W1551117360 hasRelatedWork W2095294273 @default.
- W1551117360 hasRelatedWork W2172236891 @default.
- W1551117360 hasRelatedWork W2325894594 @default.
- W1551117360 hasRelatedWork W2903101056 @default.
- W1551117360 hasVolume "157" @default.
- W1551117360 isParatext "false" @default.
- W1551117360 isRetracted "false" @default.
- W1551117360 magId "1551117360" @default.
- W1551117360 workType "article" @default.