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- W1551609711 abstract "This chapter outlines the considerations that must be taken into account when obtaining and analyzing three dimensional (3D) molecular imaging data. A series of guidelines for beam conditions during sputter depth profiling are described, as well as important data analysis considerations. It is shown that 3D imaging should always be correlated with sample topography in order to display true 3D representations of the data. Furthermore, correction factors accounting for differential sputtering, initial surface topography, and low data density are introduced. Finally, although the primary focus of this chapter is on sputter depth profiling with cluster ion beams, other means of obtaining in-depth information from soft samples are also be discussed. Overall the chapter serves as a set of guidelines for 3D organic analysis using secondary ion mass spectrometry (SIMS)." @default.
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- W1551609711 date "2013-04-15" @default.
- W1551609711 modified "2023-10-13" @default.
- W1551609711 title "Three‐Dimensional Imaging with Cluster Ion Beams" @default.
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- W1551609711 doi "https://doi.org/10.1002/9781118589335.ch6" @default.
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