FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1551704203> ?p ?o ?g. }

• W1551704203 endingPage "1423" @default.
• W1551704203 startingPage "1418" @default.
• W1551704203 abstract "Silicides are often used in Si technology for both their ohmic and rectifying properties. In this work, we have compared Zr and Ti germanosilicides as possible metallic contacts on SiGeC alloys in terms of phase formation and stability of the unreacted SiGeC alloy. The germanosilicides are obtained after rapid thermal annealings of Zr or Ti with strained SiGeC layers. The interactions of the metal films with these alloys have been investigated by sheet resistance measurements, x-ray diffraction (XRD), cross-sectional transmission electron microscopy (TEM), and energy dispersive spectroscopy in situ in the TEM. Four crystal x-ray diffraction was performed to measure the residual strain of the unreacted SiGeC epilayer after reaction. The analyses indicate that the final compounds are the C49–Zr(SiGe)2 and C54–Ti(SiGe)2 phases, respectively: In both cases, the compound is formed by monocrystalline grains with various orientations. Nevertheless, neither XRD, nor sheet resistance measurements give any clear information about the C incorporation in the phase, when the reaction occurs with a SiGeC layer. We have observed that the use of Zr completely avoids Ge segregation with an uniform layer formed, while in the case of the reaction with Ti, the grains do not form a continuous layer and Ge-segregation is evidenced: A Ge-rich Si1−z−yGez(Cy) alloy is detected in between the metallic grains. In addition, an early strain relaxation of the unreacted SiGe layer is observed after reaction, and it is much more important after reaction with Ti. During the reaction with nearly compensated SiGeC layers, Zr totally prevents the initial state of strain, while Ti strongly affects the unreacted SiGeC alloy and destroys its initial state. All these results indicate that Zr may be an interesting candidate for realizing germanosilicide contacts on IV–IV alloys, due to its good thermal stability." @default.
• W1551704203 created "2016-06-24" @default.
• W1551704203 creator A5000548358 @default.
• W1551704203 creator A5002461716 @default.
• W1551704203 creator A5006073913 @default.
• W1551704203 creator A5012028249 @default.
• W1551704203 creator A5037925984 @default.
• W1551704203 creator A5046226413 @default.
• W1551704203 creator A5048260349 @default.
• W1551704203 creator A5060467389 @default.
• W1551704203 creator A5067239428 @default.
• W1551704203 date "2000-08-01" @default.
• W1551704203 modified "2023-09-25" @default.
• W1551704203 title "Phase formation and strain relaxation during thermal reaction of Zr and Ti with strained Si1−x−yGexCy epilayers" @default.
• W1551704203 cites W1513730663 @default.
• W1551704203 cites W1612268215 @default.
• W1551704203 cites W1623360285 @default.
• W1551704203 cites W1676880983 @default.
• W1551704203 cites W1704031705 @default.
• W1551704203 cites W1965044047 @default.
• W1551704203 cites W1982910395 @default.
• W1551704203 cites W1989518159 @default.
• W1551704203 cites W2003389724 @default.
• W1551704203 cites W2010738611 @default.
• W1551704203 cites W2024194809 @default.
• W1551704203 cites W2028790358 @default.
• W1551704203 cites W2030767943 @default.
• W1551704203 cites W2036902025 @default.
• W1551704203 cites W2047623275 @default.
• W1551704203 cites W2051231031 @default.
• W1551704203 cites W2059655691 @default.
• W1551704203 cites W2076565054 @default.
• W1551704203 cites W2084357356 @default.
• W1551704203 doi "https://doi.org/10.1063/1.373833" @default.
• W1551704203 hasPublicationYear "2000" @default.
• W1551704203 type Work @default.
• W1551704203 sameAs 1551704203 @default.
• W1551704203 citedByCount "8" @default.
• W1551704203 crossrefType "journal-article" @default.
• W1551704203 hasAuthorship W1551704203A5000548358 @default.
• W1551704203 hasAuthorship W1551704203A5002461716 @default.
• W1551704203 hasAuthorship W1551704203A5006073913 @default.
• W1551704203 hasAuthorship W1551704203A5012028249 @default.
• W1551704203 hasAuthorship W1551704203A5037925984 @default.
• W1551704203 hasAuthorship W1551704203A5046226413 @default.
• W1551704203 hasAuthorship W1551704203A5048260349 @default.
• W1551704203 hasAuthorship W1551704203A5060467389 @default.
• W1551704203 hasAuthorship W1551704203A5067239428 @default.
• W1551704203 hasConcept C113196181 @default.
• W1551704203 hasConcept C127413603 @default.
• W1551704203 hasConcept C138230450 @default.
• W1551704203 hasConcept C146088050 @default.
• W1551704203 hasConcept C149912024 @default.
• W1551704203 hasConcept C159985019 @default.
• W1551704203 hasConcept C171250308 @default.
• W1551704203 hasConcept C178790620 @default.
• W1551704203 hasConcept C185592680 @default.
• W1551704203 hasConcept C192562407 @default.
• W1551704203 hasConcept C202974441 @default.
• W1551704203 hasConcept C2779227376 @default.
• W1551704203 hasConcept C2780026712 @default.
• W1551704203 hasConcept C42360764 @default.
• W1551704203 hasConcept C43617362 @default.
• W1551704203 hasConcept C44280652 @default.
• W1551704203 hasConcept C59061564 @default.
• W1551704203 hasConcept C66825105 @default.
• W1551704203 hasConcept C8010536 @default.
• W1551704203 hasConceptScore W1551704203C113196181 @default.
• W1551704203 hasConceptScore W1551704203C127413603 @default.
• W1551704203 hasConceptScore W1551704203C138230450 @default.
• W1551704203 hasConceptScore W1551704203C146088050 @default.
• W1551704203 hasConceptScore W1551704203C149912024 @default.
• W1551704203 hasConceptScore W1551704203C159985019 @default.
• W1551704203 hasConceptScore W1551704203C171250308 @default.
• W1551704203 hasConceptScore W1551704203C178790620 @default.
• W1551704203 hasConceptScore W1551704203C185592680 @default.
• W1551704203 hasConceptScore W1551704203C192562407 @default.
• W1551704203 hasConceptScore W1551704203C202974441 @default.
• W1551704203 hasConceptScore W1551704203C2779227376 @default.
• W1551704203 hasConceptScore W1551704203C2780026712 @default.
• W1551704203 hasConceptScore W1551704203C42360764 @default.
• W1551704203 hasConceptScore W1551704203C43617362 @default.
• W1551704203 hasConceptScore W1551704203C44280652 @default.
• W1551704203 hasConceptScore W1551704203C59061564 @default.
• W1551704203 hasConceptScore W1551704203C66825105 @default.
• W1551704203 hasConceptScore W1551704203C8010536 @default.
• W1551704203 hasIssue "3" @default.
• W1551704203 hasLocation W15517042031 @default.
• W1551704203 hasOpenAccess W1551704203 @default.
• W1551704203 hasPrimaryLocation W15517042031 @default.
• W1551704203 hasRelatedWork W2023156270 @default.
• W1551704203 hasRelatedWork W2045106606 @default.
• W1551704203 hasRelatedWork W2084038818 @default.
• W1551704203 hasRelatedWork W2094543471 @default.
• W1551704203 hasRelatedWork W2095442749 @default.
• W1551704203 hasRelatedWork W2292172144 @default.
• W1551704203 hasRelatedWork W2364752264 @default.
• W1551704203 hasRelatedWork W2910986511 @default.

• next