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- W1551870602 abstract "On-wafer measurements of multi-layer thin-film components in the mm-wave frequency range may involve uncertainties and parasitic effects due to adjacent structures on the wafer. Starting from a measured result, this paper investigates the parasitic effects causing the problem. It is found that it is the geometry of the probe head which plays an important role for the parasitic coupling." @default.
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- W1551870602 date "2013-12-23" @default.
- W1551870602 modified "2023-09-23" @default.
- W1551870602 title "Parasitic effects and measurement uncertainties in multi-layer thin-film structures" @default.
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