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- W1552320239 abstract "Generally CD (critical dimension) measurement is an important role for verify the FEM (Focus Exposure Matrix) process window. However, the generally CD measurement is rough due to only measure few site in wafer. The results cannot get the high accuracy information for verification the FEM process window and waste a lot of FEM process time. In this paper, we have demonstrate a new methodology that can get rapidly and precisely verify FEM process window by advanced CD measurement go through high resolution images and contour extraction." @default.
- W1552320239 created "2016-06-24" @default.
- W1552320239 creator A5004560416 @default.
- W1552320239 creator A5014785857 @default.
- W1552320239 creator A5021429823 @default.
- W1552320239 creator A5031659577 @default.
- W1552320239 creator A5056959112 @default.
- W1552320239 creator A5082109806 @default.
- W1552320239 creator A5062092777 @default.
- W1552320239 date "2015-03-01" @default.
- W1552320239 modified "2023-09-27" @default.
- W1552320239 title "The new methodology of contact process window vericification" @default.
- W1552320239 cites W2041535649 @default.
- W1552320239 cites W2052912748 @default.
- W1552320239 cites W2100077366 @default.
- W1552320239 doi "https://doi.org/10.1109/cstic.2015.7153354" @default.
- W1552320239 hasPublicationYear "2015" @default.
- W1552320239 type Work @default.
- W1552320239 sameAs 1552320239 @default.
- W1552320239 citedByCount "0" @default.
- W1552320239 crossrefType "proceedings-article" @default.
- W1552320239 hasAuthorship W1552320239A5004560416 @default.
- W1552320239 hasAuthorship W1552320239A5014785857 @default.
- W1552320239 hasAuthorship W1552320239A5021429823 @default.
- W1552320239 hasAuthorship W1552320239A5031659577 @default.
- W1552320239 hasAuthorship W1552320239A5056959112 @default.
- W1552320239 hasAuthorship W1552320239A5062092777 @default.
- W1552320239 hasAuthorship W1552320239A5082109806 @default.
- W1552320239 hasConcept C111919701 @default.
- W1552320239 hasConcept C120665830 @default.
- W1552320239 hasConcept C121332964 @default.
- W1552320239 hasConcept C124101348 @default.
- W1552320239 hasConcept C127413603 @default.
- W1552320239 hasConcept C135628077 @default.
- W1552320239 hasConcept C192209626 @default.
- W1552320239 hasConcept C202444582 @default.
- W1552320239 hasConcept C2777441419 @default.
- W1552320239 hasConcept C2778751112 @default.
- W1552320239 hasConcept C2780009758 @default.
- W1552320239 hasConcept C33676613 @default.
- W1552320239 hasConcept C33923547 @default.
- W1552320239 hasConcept C41008148 @default.
- W1552320239 hasConcept C66938386 @default.
- W1552320239 hasConcept C98045186 @default.
- W1552320239 hasConceptScore W1552320239C111919701 @default.
- W1552320239 hasConceptScore W1552320239C120665830 @default.
- W1552320239 hasConceptScore W1552320239C121332964 @default.
- W1552320239 hasConceptScore W1552320239C124101348 @default.
- W1552320239 hasConceptScore W1552320239C127413603 @default.
- W1552320239 hasConceptScore W1552320239C135628077 @default.
- W1552320239 hasConceptScore W1552320239C192209626 @default.
- W1552320239 hasConceptScore W1552320239C202444582 @default.
- W1552320239 hasConceptScore W1552320239C2777441419 @default.
- W1552320239 hasConceptScore W1552320239C2778751112 @default.
- W1552320239 hasConceptScore W1552320239C2780009758 @default.
- W1552320239 hasConceptScore W1552320239C33676613 @default.
- W1552320239 hasConceptScore W1552320239C33923547 @default.
- W1552320239 hasConceptScore W1552320239C41008148 @default.
- W1552320239 hasConceptScore W1552320239C66938386 @default.
- W1552320239 hasConceptScore W1552320239C98045186 @default.
- W1552320239 hasLocation W15523202391 @default.
- W1552320239 hasOpenAccess W1552320239 @default.
- W1552320239 hasPrimaryLocation W15523202391 @default.
- W1552320239 hasRelatedWork W1972737456 @default.
- W1552320239 hasRelatedWork W2006274198 @default.
- W1552320239 hasRelatedWork W2010820097 @default.
- W1552320239 hasRelatedWork W2037372492 @default.
- W1552320239 hasRelatedWork W2050377736 @default.
- W1552320239 hasRelatedWork W2060357748 @default.
- W1552320239 hasRelatedWork W206815750 @default.
- W1552320239 hasRelatedWork W2070971595 @default.
- W1552320239 hasRelatedWork W2079476865 @default.
- W1552320239 hasRelatedWork W2107650855 @default.
- W1552320239 hasRelatedWork W2118997544 @default.
- W1552320239 hasRelatedWork W2152426250 @default.
- W1552320239 hasRelatedWork W2319523382 @default.
- W1552320239 hasRelatedWork W2328793541 @default.
- W1552320239 hasRelatedWork W2546383538 @default.
- W1552320239 hasRelatedWork W2924028932 @default.
- W1552320239 hasRelatedWork W3129754259 @default.
- W1552320239 hasRelatedWork W781616578 @default.
- W1552320239 hasRelatedWork W2751773180 @default.
- W1552320239 hasRelatedWork W3182645304 @default.
- W1552320239 isParatext "false" @default.
- W1552320239 isRetracted "false" @default.
- W1552320239 magId "1552320239" @default.
- W1552320239 workType "article" @default.