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- W1552779076 abstract "This paper is devoted to the study of the anisotropy of the chemical attack of (hk̄0) silicon plates in a water–T.M.A.H. solution 25% in weight. In the first part 12 different orientations were investigated and emphasis is placed on the changes in the geometrical features of etched (hk̄0) surfaces and in the starting circular section of thick (hk̄0) plates with the angle of cut. In the second part orientation effects in 2D experimental etching shapes are analysed to determine a database (composed of dissolution constants) which characterizes the anisotropy of the T.M.A.H. etchant. The adequation of the database is then discussed by comparing the experimental 2D etching shapes with theoretical shapes as derived from the database using a kinematic and tensorial model of the anisotropic dissolution." @default.
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- W1552779076 date "1999-10-01" @default.
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- W1552779076 title "Characterization of the anisotropic chemical attack of {hk0} silicon plates in a T.M.A.H. solution" @default.
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- W1552779076 doi "https://doi.org/10.1016/s0924-4247(99)00020-5" @default.
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