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- W1552901919 abstract "Photochemical Processing: Fundamental Mechanisms and Operating Criteria. Developments in Excimer Lasers for Photochemical Processing. Deep UV Optics for Excimer Lasers. Sub-Micron Lithography for Semiconductor Device Ravrication. Promoting Photonucleation on Semiconductor Substrates for Metallization. Considerations of the Microscopic Basis for Photo-Enhanced Chemical Beam Epitaxy. Photo-Assisted II-VI Epitaxial Growth. IR and UV Photo-Assisted Formation of Silicon Dioxide. Gas Immersion Laser Doping (GLD) in Silcon. Photochemical Etching of III-V Semiconductors. Excimer Laser Chemical Etching Fo Silicon and Copper. Laser Ablation of Polymers. Laser Ablation of Superconductors. Fast In-Situ Metallisation: A Comparison of Several Methods with Possible Applications in High Density Multichip Interconnects. Laser Asisted Fabrication of Integrated Circuits in Gallium Arsenide. Photon Probes for In-Process Control During Semiconductor Fabrication. Index." @default.
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- W1552901919 date "1992-01-01" @default.
- W1552901919 modified "2023-09-22" @default.
- W1552901919 title "Photochemical processing of electronic materials" @default.
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