Matches in SemOpenAlex for { <https://semopenalex.org/work/W1553591288> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W1553591288 abstract "Abstract : The goal of this research program is to develop Pulsed Laser Deposition (PLD) as a method for depositing device quality, single crystal silicon carbide (SiC) thin films. Phase I has demonstrated the ability to deposit single crystal 3C-SiC thin films on Si (100) and 6H-SiC (0001) substrates. An existing PLD facility was improved for SiC depositions. Prior to PLD, all substrates were prepared using a novel spin etch technique. Numerous experiments explored the effect of substrate temperature and laser fluence on the resulting SiC films. Composition of the films was measured by Rutherford backscattering spectrometry and Scanning Auger Microprobe. The films were slightly carbon-rich although the excess carbon component was attributed to background contaminants in our vacuum system. Optical analyses included Fourier Transform infrared (FT-IR) spectroscopy. Epitaxy of the 3C-SiC films was confirmed by x-ray diffraction, transmission electron microscopy, and electron diffraction. Epitaxial SiC films were grown on Si (100) at temperatures as low as 930 deg C, although the crystallinity of the films improved with increasing temperature. The best films result at laser fluences of 1.5 - 2 J/sq cm. Single crystal films were obtained on 6H-SiC (0001) and vicinal 6H-SiC (0001) oriented 3.5 towards 1120 at 1200 deg C." @default.
- W1553591288 created "2016-06-24" @default.
- W1553591288 creator A5013369427 @default.
- W1553591288 creator A5062840655 @default.
- W1553591288 creator A5085694579 @default.
- W1553591288 creator A5088851027 @default.
- W1553591288 creator A5090003201 @default.
- W1553591288 date "1995-02-20" @default.
- W1553591288 modified "2023-09-28" @default.
- W1553591288 title "Epitaxial Growth of High Quality SiC of Pulsed Laser Deposition." @default.
- W1553591288 doi "https://doi.org/10.21236/ada360082" @default.
- W1553591288 hasPublicationYear "1995" @default.
- W1553591288 type Work @default.
- W1553591288 sameAs 1553591288 @default.
- W1553591288 citedByCount "1" @default.
- W1553591288 crossrefType "report" @default.
- W1553591288 hasAuthorship W1553591288A5013369427 @default.
- W1553591288 hasAuthorship W1553591288A5062840655 @default.
- W1553591288 hasAuthorship W1553591288A5085694579 @default.
- W1553591288 hasAuthorship W1553591288A5088851027 @default.
- W1553591288 hasAuthorship W1553591288A5090003201 @default.
- W1553591288 hasConcept C110738630 @default.
- W1553591288 hasConcept C111368507 @default.
- W1553591288 hasConcept C113196181 @default.
- W1553591288 hasConcept C120665830 @default.
- W1553591288 hasConcept C121332964 @default.
- W1553591288 hasConcept C127313418 @default.
- W1553591288 hasConcept C159985019 @default.
- W1553591288 hasConcept C171250308 @default.
- W1553591288 hasConcept C185544564 @default.
- W1553591288 hasConcept C185592680 @default.
- W1553591288 hasConcept C19067145 @default.
- W1553591288 hasConcept C192562407 @default.
- W1553591288 hasConcept C22078206 @default.
- W1553591288 hasConcept C25442681 @default.
- W1553591288 hasConcept C2777289219 @default.
- W1553591288 hasConcept C2779227376 @default.
- W1553591288 hasConcept C2780547777 @default.
- W1553591288 hasConcept C2780722187 @default.
- W1553591288 hasConcept C37982897 @default.
- W1553591288 hasConcept C43617362 @default.
- W1553591288 hasConcept C46275449 @default.
- W1553591288 hasConcept C49040817 @default.
- W1553591288 hasConcept C520434653 @default.
- W1553591288 hasConcept C73922627 @default.
- W1553591288 hasConcept C8010536 @default.
- W1553591288 hasConceptScore W1553591288C110738630 @default.
- W1553591288 hasConceptScore W1553591288C111368507 @default.
- W1553591288 hasConceptScore W1553591288C113196181 @default.
- W1553591288 hasConceptScore W1553591288C120665830 @default.
- W1553591288 hasConceptScore W1553591288C121332964 @default.
- W1553591288 hasConceptScore W1553591288C127313418 @default.
- W1553591288 hasConceptScore W1553591288C159985019 @default.
- W1553591288 hasConceptScore W1553591288C171250308 @default.
- W1553591288 hasConceptScore W1553591288C185544564 @default.
- W1553591288 hasConceptScore W1553591288C185592680 @default.
- W1553591288 hasConceptScore W1553591288C19067145 @default.
- W1553591288 hasConceptScore W1553591288C192562407 @default.
- W1553591288 hasConceptScore W1553591288C22078206 @default.
- W1553591288 hasConceptScore W1553591288C25442681 @default.
- W1553591288 hasConceptScore W1553591288C2777289219 @default.
- W1553591288 hasConceptScore W1553591288C2779227376 @default.
- W1553591288 hasConceptScore W1553591288C2780547777 @default.
- W1553591288 hasConceptScore W1553591288C2780722187 @default.
- W1553591288 hasConceptScore W1553591288C37982897 @default.
- W1553591288 hasConceptScore W1553591288C43617362 @default.
- W1553591288 hasConceptScore W1553591288C46275449 @default.
- W1553591288 hasConceptScore W1553591288C49040817 @default.
- W1553591288 hasConceptScore W1553591288C520434653 @default.
- W1553591288 hasConceptScore W1553591288C73922627 @default.
- W1553591288 hasConceptScore W1553591288C8010536 @default.
- W1553591288 hasLocation W15535912881 @default.
- W1553591288 hasOpenAccess W1553591288 @default.
- W1553591288 hasPrimaryLocation W15535912881 @default.
- W1553591288 hasRelatedWork W1515709753 @default.
- W1553591288 hasRelatedWork W1967411367 @default.
- W1553591288 hasRelatedWork W2006216876 @default.
- W1553591288 hasRelatedWork W2010029662 @default.
- W1553591288 hasRelatedWork W2012381520 @default.
- W1553591288 hasRelatedWork W2020918846 @default.
- W1553591288 hasRelatedWork W2038441905 @default.
- W1553591288 hasRelatedWork W2041603998 @default.
- W1553591288 hasRelatedWork W2066861191 @default.
- W1553591288 hasRelatedWork W2075277494 @default.
- W1553591288 hasRelatedWork W2077009280 @default.
- W1553591288 hasRelatedWork W2092182712 @default.
- W1553591288 hasRelatedWork W2093637922 @default.
- W1553591288 hasRelatedWork W2104581965 @default.
- W1553591288 hasRelatedWork W2133390909 @default.
- W1553591288 hasRelatedWork W2243002049 @default.
- W1553591288 hasRelatedWork W2365737377 @default.
- W1553591288 hasRelatedWork W2921264947 @default.
- W1553591288 hasRelatedWork W1969371979 @default.
- W1553591288 hasRelatedWork W2182635444 @default.
- W1553591288 isParatext "false" @default.
- W1553591288 isRetracted "false" @default.
- W1553591288 magId "1553591288" @default.
- W1553591288 workType "report" @default.