Matches in SemOpenAlex for { <https://semopenalex.org/work/W1553730488> ?p ?o ?g. }
- W1553730488 abstract "Publisher Summary This chapter describes the defect processes in semiconductors studied at the atomic level by transmission electron microscopy. The semiconductor industry roadmap for the next decade calls for the fabrication of chips consisting of up to 50 billion transistors, each being 200 atoms long and 50 atoms deep. This degree of manufacturability requires unprecedented control of a variety of defect-mediated processes in near-surface regions with microscopic lateral dimensions. To predict and control diffusion behavior or interfacial roughness on such length scales, characterization techniques offering resolution and sensitivity are indispensable for process development and optimization. Many characterization techniques have been developed, each with its specific strengths and limitations. Each method can be classified by its spatial resolution, sensitivity, statistical reliability, and ease of use. Recently, high-resolution transmission electron microscopy (HRTEM) entered the quantitative era. Different approaches for quantitative evaluation of HRTEM lattice images have been developed for specific problem classes." @default.
- W1553730488 created "2016-06-24" @default.
- W1553730488 creator A5000210944 @default.
- W1553730488 creator A5019504319 @default.
- W1553730488 creator A5020400856 @default.
- W1553730488 creator A5046278266 @default.
- W1553730488 creator A5070262564 @default.
- W1553730488 date "1999-01-01" @default.
- W1553730488 modified "2023-10-02" @default.
- W1553730488 title "Chapter 4 Defect Processes in Semiconductors Studied at the Atomic Level by Transmission Electron Microscopy" @default.
- W1553730488 cites W1578255248 @default.
- W1553730488 cites W1965851754 @default.
- W1553730488 cites W1965936213 @default.
- W1553730488 cites W1972936651 @default.
- W1553730488 cites W1976565467 @default.
- W1553730488 cites W1978996365 @default.
- W1553730488 cites W1986689571 @default.
- W1553730488 cites W1987739512 @default.
- W1553730488 cites W1992653016 @default.
- W1553730488 cites W1993415811 @default.
- W1553730488 cites W1995820125 @default.
- W1553730488 cites W1995875735 @default.
- W1553730488 cites W1997566969 @default.
- W1553730488 cites W2002309394 @default.
- W1553730488 cites W2004895149 @default.
- W1553730488 cites W2005039622 @default.
- W1553730488 cites W2011822147 @default.
- W1553730488 cites W2015024259 @default.
- W1553730488 cites W2015380899 @default.
- W1553730488 cites W2019947297 @default.
- W1553730488 cites W2020384615 @default.
- W1553730488 cites W2027844299 @default.
- W1553730488 cites W2033432567 @default.
- W1553730488 cites W2034167039 @default.
- W1553730488 cites W2034427507 @default.
- W1553730488 cites W2035533405 @default.
- W1553730488 cites W2039159680 @default.
- W1553730488 cites W2040186377 @default.
- W1553730488 cites W2042143886 @default.
- W1553730488 cites W2044634405 @default.
- W1553730488 cites W2048564222 @default.
- W1553730488 cites W2053359891 @default.
- W1553730488 cites W2057342896 @default.
- W1553730488 cites W2065222509 @default.
- W1553730488 cites W2078587369 @default.
- W1553730488 cites W2079738192 @default.
- W1553730488 cites W2080698204 @default.
- W1553730488 cites W2084611735 @default.
- W1553730488 cites W2093203937 @default.
- W1553730488 cites W2113415482 @default.
- W1553730488 cites W2203245454 @default.
- W1553730488 cites W2506651301 @default.
- W1553730488 cites W3209311270 @default.
- W1553730488 cites W407669220 @default.
- W1553730488 cites W2460047818 @default.
- W1553730488 doi "https://doi.org/10.1016/s0080-8784(08)62977-4" @default.
- W1553730488 hasPublicationYear "1999" @default.
- W1553730488 type Work @default.
- W1553730488 sameAs 1553730488 @default.
- W1553730488 citedByCount "0" @default.
- W1553730488 crossrefType "book-chapter" @default.
- W1553730488 hasAuthorship W1553730488A5000210944 @default.
- W1553730488 hasAuthorship W1553730488A5019504319 @default.
- W1553730488 hasAuthorship W1553730488A5020400856 @default.
- W1553730488 hasAuthorship W1553730488A5046278266 @default.
- W1553730488 hasAuthorship W1553730488A5070262564 @default.
- W1553730488 hasConcept C108225325 @default.
- W1553730488 hasConcept C146088050 @default.
- W1553730488 hasConcept C161368742 @default.
- W1553730488 hasConcept C171250308 @default.
- W1553730488 hasConcept C192562407 @default.
- W1553730488 hasConcept C2780841128 @default.
- W1553730488 hasConcept C49040817 @default.
- W1553730488 hasConceptScore W1553730488C108225325 @default.
- W1553730488 hasConceptScore W1553730488C146088050 @default.
- W1553730488 hasConceptScore W1553730488C161368742 @default.
- W1553730488 hasConceptScore W1553730488C171250308 @default.
- W1553730488 hasConceptScore W1553730488C192562407 @default.
- W1553730488 hasConceptScore W1553730488C2780841128 @default.
- W1553730488 hasConceptScore W1553730488C49040817 @default.
- W1553730488 hasLocation W15537304881 @default.
- W1553730488 hasOpenAccess W1553730488 @default.
- W1553730488 hasPrimaryLocation W15537304881 @default.
- W1553730488 hasRelatedWork W1560979785 @default.
- W1553730488 hasRelatedWork W1581867930 @default.
- W1553730488 hasRelatedWork W1647496167 @default.
- W1553730488 hasRelatedWork W1965364361 @default.
- W1553730488 hasRelatedWork W1970055387 @default.
- W1553730488 hasRelatedWork W1990923306 @default.
- W1553730488 hasRelatedWork W1993258538 @default.
- W1553730488 hasRelatedWork W2011266160 @default.
- W1553730488 hasRelatedWork W2055399467 @default.
- W1553730488 hasRelatedWork W2060202932 @default.
- W1553730488 hasRelatedWork W2079410268 @default.
- W1553730488 hasRelatedWork W2092391142 @default.
- W1553730488 hasRelatedWork W2125978209 @default.
- W1553730488 hasRelatedWork W2128629135 @default.
- W1553730488 hasRelatedWork W2165755757 @default.
- W1553730488 hasRelatedWork W2461394068 @default.
- W1553730488 hasRelatedWork W26166869 @default.