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• W1554071982 abstract "In this paper, we have fabricated successfully Si-tip FEAs on the 3/spl deg/ (100) Si substrate (N type /spl rho/=3/spl sim/5 /spl Omega/cm) using wet etching (EPW and KOH), dry-wet-dry alternating oxidation sharpening at 1050/spl deg/C and phosphorus diffusion technique. The density of tips is up to 15000 tips/mm/sup 2/, and radii of the tips are 30 nm. At 110 V on the grid, currents averaging to 53 nA/tip have been measured. Its diode was also fabricated. The radius of grid hole is 1.5 /spl mu/m, and the height of tips is approximate to 2.1 /spl mu/m for EPI and 4.2 /spl mu/m for KOH. The diode added an external anode. A triode was formed as well. While measuring I-V characteristic of diode, we observed the edge effect of MIS structure. After we changed some masks of the diode, the effect was removed. We observed and analyzed the surface of the FEAs after they were broken down by ion bombarding in an intense electric field and air surrounding." @default.
• W1554071982 created "2016-06-24" @default.
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• W1554071982 date "2002-11-19" @default.
• W1554071982 modified "2023-09-25" @default.
• W1554071982 title "Fabrication and characteristics of micro-vacuum tube of Si-tip FEAs" @default.
• W1554071982 cites W1995935156 @default.
• W1554071982 cites W2065720205 @default.
• W1554071982 doi "https://doi.org/10.1109/ivmc.1995.486981" @default.
• W1554071982 hasPublicationYear "2002" @default.
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