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- W1554715009 endingPage "134" @default.
- W1554715009 startingPage "133" @default.
- W1554715009 abstract "EUV lithography (EUVL) employs illumination wavelengths around 13.5 nm, and in many aspects it is considered an extension of optical lithography, which is used for the high-volume manufacturing (HVM) of today's microprocessors. The EUV wavelength of illumination dictates the use of reflective optical elements (mirrors) as opposed to the refractive lenses used in conventional lithographic systems. Thus, EUVL tools are based on all-reflective concepts: they use multilayer (ML) coated optics for their illumination and projection systems, and they have a ML-coated reflective mask." @default.
- W1554715009 created "2016-06-24" @default.
- W1554715009 creator A5030143484 @default.
- W1554715009 creator A5038975156 @default.
- W1554715009 creator A5049340090 @default.
- W1554715009 creator A5090353104 @default.
- W1554715009 date "2009-12-04" @default.
- W1554715009 modified "2023-09-26" @default.
- W1554715009 title "Optics and Multilayer Coatings for EUVL Systems" @default.
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