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• W1554718448 abstract "Nb/Al-AlN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> /Nb SIS junctions have been fabricated under various conditions of plasma nitridation. Junctions with low R <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>N</sub> A of ~ 10 Omega mum <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> have been fabricated in pure nitrogen plasma, although this process exhibited low reproducibility. A process with higher reproducibility was realized by adopting a two-step-ignition nitridation process in a composite plasma of N <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> and Ar. An exponential correlation between the nitridation time and the junction R <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>N</sub> A was found for the junctions with barriers formed in this new process, which suggests a linear time dependence of the barrier thickness during nitridation. SIS junctions with R <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>N</sub> A ~ 10 Omega mum <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> can be repeatedly produced using this process. Preliminary results from X-ray photoelectron spectroscopy (XPS) observations of the nitride barrier are also presented. While the N 1s XPS signal was apparently detected in the junctions with high R <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>N</sub> A, their intensity was reduced as R <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>N</sub> A the decreases." @default.
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• W1554718448 date "2007-06-01" @default.
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• W1554718448 title "Development of ${hbox{Nb/Al-AlN}}_{rm x}/{hbox{Nb}}$ SIS Tunnel Junctions for Submillimeter-Wave Mixers" @default.
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• W1554718448 doi "https://doi.org/10.1109/tasc.2007.899802" @default.
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