Matches in SemOpenAlex for { <https://semopenalex.org/work/W1555889870> ?p ?o ?g. }
- W1555889870 endingPage "2449" @default.
- W1555889870 startingPage "2447" @default.
- W1555889870 abstract "Ultrathin Y2O3 films were electron beam evaporated in an ultrahigh vacuum onto Si(100) and investigated by high-resolution medium energy ion scattering. Selected films were capped in situ with amorphous Si. Uncapped films that were exposed to air prior to analysis contained excess oxygen compared to a stoichiometric Y2O3 film, and showed a 6–8 Å interfacial layer. Si uptake from the substrate occurred in these films after a 700 °C vacuum anneal, presumably by reacting with the excess oxygen. Si-capped Y2O3 films on the other hand were stoichiometric, and the substrate interface was sharp (⩽2 Å), even after 900 °C vacuum anneals. No change was seen at the Y2O3 capping layer interface until ⩾800 °C for vacuum anneals. These measurements indicate that control of the interface composition is not possible after exposure of ultrathin Y2O3 films to air." @default.
- W1555889870 created "2016-06-24" @default.
- W1555889870 creator A5020678813 @default.
- W1555889870 creator A5037419608 @default.
- W1555889870 creator A5044534355 @default.
- W1555889870 creator A5048109997 @default.
- W1555889870 creator A5050964329 @default.
- W1555889870 creator A5075750116 @default.
- W1555889870 creator A5085265638 @default.
- W1555889870 creator A5088552682 @default.
- W1555889870 date "2001-10-08" @default.
- W1555889870 modified "2023-09-27" @default.
- W1555889870 title "Interface reactions of high-κ Y2O3 gate oxides with Si" @default.
- W1555889870 cites W1494087470 @default.
- W1555889870 cites W1995920390 @default.
- W1555889870 cites W2003645630 @default.
- W1555889870 cites W2008449124 @default.
- W1555889870 cites W2019592005 @default.
- W1555889870 cites W2025981969 @default.
- W1555889870 cites W2045377480 @default.
- W1555889870 cites W2062953588 @default.
- W1555889870 cites W2129951600 @default.
- W1555889870 doi "https://doi.org/10.1063/1.1406989" @default.
- W1555889870 hasPublicationYear "2001" @default.
- W1555889870 type Work @default.
- W1555889870 sameAs 1555889870 @default.
- W1555889870 citedByCount "61" @default.
- W1555889870 countsByYear W15558898702012 @default.
- W1555889870 countsByYear W15558898702013 @default.
- W1555889870 countsByYear W15558898702015 @default.
- W1555889870 countsByYear W15558898702016 @default.
- W1555889870 countsByYear W15558898702018 @default.
- W1555889870 countsByYear W15558898702022 @default.
- W1555889870 crossrefType "journal-article" @default.
- W1555889870 hasAuthorship W1555889870A5020678813 @default.
- W1555889870 hasAuthorship W1555889870A5037419608 @default.
- W1555889870 hasAuthorship W1555889870A5044534355 @default.
- W1555889870 hasAuthorship W1555889870A5048109997 @default.
- W1555889870 hasAuthorship W1555889870A5050964329 @default.
- W1555889870 hasAuthorship W1555889870A5075750116 @default.
- W1555889870 hasAuthorship W1555889870A5085265638 @default.
- W1555889870 hasAuthorship W1555889870A5088552682 @default.
- W1555889870 hasConcept C111368507 @default.
- W1555889870 hasConcept C113196181 @default.
- W1555889870 hasConcept C127313418 @default.
- W1555889870 hasConcept C144082473 @default.
- W1555889870 hasConcept C147789679 @default.
- W1555889870 hasConcept C171250308 @default.
- W1555889870 hasConcept C178790620 @default.
- W1555889870 hasConcept C185592680 @default.
- W1555889870 hasConcept C191897082 @default.
- W1555889870 hasConcept C192562407 @default.
- W1555889870 hasConcept C2777289219 @default.
- W1555889870 hasConcept C2777855556 @default.
- W1555889870 hasConcept C2779227376 @default.
- W1555889870 hasConcept C43617362 @default.
- W1555889870 hasConcept C49040817 @default.
- W1555889870 hasConcept C540031477 @default.
- W1555889870 hasConcept C544956773 @default.
- W1555889870 hasConcept C56052488 @default.
- W1555889870 hasConcept C8010536 @default.
- W1555889870 hasConceptScore W1555889870C111368507 @default.
- W1555889870 hasConceptScore W1555889870C113196181 @default.
- W1555889870 hasConceptScore W1555889870C127313418 @default.
- W1555889870 hasConceptScore W1555889870C144082473 @default.
- W1555889870 hasConceptScore W1555889870C147789679 @default.
- W1555889870 hasConceptScore W1555889870C171250308 @default.
- W1555889870 hasConceptScore W1555889870C178790620 @default.
- W1555889870 hasConceptScore W1555889870C185592680 @default.
- W1555889870 hasConceptScore W1555889870C191897082 @default.
- W1555889870 hasConceptScore W1555889870C192562407 @default.
- W1555889870 hasConceptScore W1555889870C2777289219 @default.
- W1555889870 hasConceptScore W1555889870C2777855556 @default.
- W1555889870 hasConceptScore W1555889870C2779227376 @default.
- W1555889870 hasConceptScore W1555889870C43617362 @default.
- W1555889870 hasConceptScore W1555889870C49040817 @default.
- W1555889870 hasConceptScore W1555889870C540031477 @default.
- W1555889870 hasConceptScore W1555889870C544956773 @default.
- W1555889870 hasConceptScore W1555889870C56052488 @default.
- W1555889870 hasConceptScore W1555889870C8010536 @default.
- W1555889870 hasIssue "15" @default.
- W1555889870 hasLocation W15558898701 @default.
- W1555889870 hasOpenAccess W1555889870 @default.
- W1555889870 hasPrimaryLocation W15558898701 @default.
- W1555889870 hasRelatedWork W1873547521 @default.
- W1555889870 hasRelatedWork W1993456033 @default.
- W1555889870 hasRelatedWork W1997998638 @default.
- W1555889870 hasRelatedWork W2050041811 @default.
- W1555889870 hasRelatedWork W2051362955 @default.
- W1555889870 hasRelatedWork W2072581800 @default.
- W1555889870 hasRelatedWork W2092757271 @default.
- W1555889870 hasRelatedWork W2169757209 @default.
- W1555889870 hasRelatedWork W3140127075 @default.
- W1555889870 hasRelatedWork W823364632 @default.
- W1555889870 hasVolume "79" @default.
- W1555889870 isParatext "false" @default.
- W1555889870 isRetracted "false" @default.
- W1555889870 magId "1555889870" @default.