FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1556555419> ?p ?o ?g. }

• W1556555419 abstract "Summary form only given. With half pitch k factors rapidly approaching sub 0.4, many lithography groups have looked seriously into alternative patterning and mask techniques. The semiconductor industry continues to explore numerous techniques for printing smaller geometry's with the hope of improving resolution and process window. There are a number of new and interesting mask/illumination techniques that have been published. These new mask techniques come with a variety of integration issues and manufacturing risks. The ITRS roadmap has become a living document with continuous change as imaging nodes change with improvements in imaging techniques or from delays in tool and process programs. ArF initially was planned for introduction at 0.18 /spl mu/m, however; real implementation may not begin until the 0.13 /spl mu/m or 0.100 /spl mu/m depending on the company. Moreover, very high NA ArF is now considered the up front candidate for the 0.065 /spl mu/m node. This presentation will discuss the various activities centered on imaging techniques to support the 0.065/spl mu/m node with high NA ArF. The authors will discuss experimental activities for 0.100 /spl mu/m and sub-0.100 /spl mu/m contacts along with 0.065mn imaging through a variety of mask and illumination techniques." @default.
• W1556555419 created "2016-06-24" @default.
• W1556555419 creator A5008225061 @default.
• W1556555419 creator A5010434997 @default.
• W1556555419 creator A5010502185 @default.
• W1556555419 creator A5010924487 @default.
• W1556555419 creator A5014225377 @default.
• W1556555419 creator A5014428912 @default.
• W1556555419 creator A5019091215 @default.
• W1556555419 creator A5019355946 @default.
• W1556555419 creator A5032035177 @default.
• W1556555419 creator A5033466118 @default.
• W1556555419 creator A5039771729 @default.
• W1556555419 creator A5042548451 @default.
• W1556555419 creator A5043014796 @default.
• W1556555419 creator A5045527615 @default.
• W1556555419 creator A5056927656 @default.
• W1556555419 creator A5057243931 @default.
• W1556555419 creator A5064463858 @default.
• W1556555419 creator A5066197759 @default.
• W1556555419 creator A5068767264 @default.
• W1556555419 creator A5073191935 @default.
• W1556555419 creator A5077159235 @default.
• W1556555419 creator A5078249911 @default.
• W1556555419 creator A5081069281 @default.
• W1556555419 creator A5084063230 @default.
• W1556555419 creator A5086108388 @default.
• W1556555419 creator A5088347174 @default.
• W1556555419 creator A5090314485 @default.
• W1556555419 date "2003-08-27" @default.
• W1556555419 modified "2023-09-22" @default.
• W1556555419 title "Imaging techniques to support low k1 optical lithography" @default.
• W1556555419 doi "https://doi.org/10.1109/imnc.2002.1178659" @default.
• W1556555419 hasPublicationYear "2003" @default.
• W1556555419 type Work @default.
• W1556555419 sameAs 1556555419 @default.
• W1556555419 citedByCount "0" @default.
• W1556555419 crossrefType "proceedings-article" @default.
• W1556555419 hasAuthorship W1556555419A5008225061 @default.
• W1556555419 hasAuthorship W1556555419A5010434997 @default.
• W1556555419 hasAuthorship W1556555419A5010502185 @default.
• W1556555419 hasAuthorship W1556555419A5010924487 @default.
• W1556555419 hasAuthorship W1556555419A5014225377 @default.
• W1556555419 hasAuthorship W1556555419A5014428912 @default.
• W1556555419 hasAuthorship W1556555419A5019091215 @default.
• W1556555419 hasAuthorship W1556555419A5019355946 @default.
• W1556555419 hasAuthorship W1556555419A5032035177 @default.
• W1556555419 hasAuthorship W1556555419A5033466118 @default.
• W1556555419 hasAuthorship W1556555419A5039771729 @default.
• W1556555419 hasAuthorship W1556555419A5042548451 @default.
• W1556555419 hasAuthorship W1556555419A5043014796 @default.
• W1556555419 hasAuthorship W1556555419A5045527615 @default.
• W1556555419 hasAuthorship W1556555419A5056927656 @default.
• W1556555419 hasAuthorship W1556555419A5057243931 @default.
• W1556555419 hasAuthorship W1556555419A5064463858 @default.
• W1556555419 hasAuthorship W1556555419A5066197759 @default.
• W1556555419 hasAuthorship W1556555419A5068767264 @default.
• W1556555419 hasAuthorship W1556555419A5073191935 @default.
• W1556555419 hasAuthorship W1556555419A5077159235 @default.
• W1556555419 hasAuthorship W1556555419A5078249911 @default.
• W1556555419 hasAuthorship W1556555419A5081069281 @default.
• W1556555419 hasAuthorship W1556555419A5084063230 @default.
• W1556555419 hasAuthorship W1556555419A5086108388 @default.
• W1556555419 hasAuthorship W1556555419A5088347174 @default.
• W1556555419 hasAuthorship W1556555419A5090314485 @default.
• W1556555419 hasConcept C111919701 @default.
• W1556555419 hasConcept C120665830 @default.
• W1556555419 hasConcept C121332964 @default.
• W1556555419 hasConcept C136197465 @default.
• W1556555419 hasConcept C154945302 @default.
• W1556555419 hasConcept C171250308 @default.
• W1556555419 hasConcept C192562407 @default.
• W1556555419 hasConcept C204223013 @default.
• W1556555419 hasConcept C2777441419 @default.
• W1556555419 hasConcept C2779227376 @default.
• W1556555419 hasConcept C41008148 @default.
• W1556555419 hasConcept C53524968 @default.
• W1556555419 hasConcept C62520636 @default.
• W1556555419 hasConcept C62611344 @default.
• W1556555419 hasConcept C92630104 @default.
• W1556555419 hasConcept C94263209 @default.
• W1556555419 hasConcept C98045186 @default.
• W1556555419 hasConceptScore W1556555419C111919701 @default.
• W1556555419 hasConceptScore W1556555419C120665830 @default.
• W1556555419 hasConceptScore W1556555419C121332964 @default.
• W1556555419 hasConceptScore W1556555419C136197465 @default.
• W1556555419 hasConceptScore W1556555419C154945302 @default.
• W1556555419 hasConceptScore W1556555419C171250308 @default.
• W1556555419 hasConceptScore W1556555419C192562407 @default.
• W1556555419 hasConceptScore W1556555419C204223013 @default.
• W1556555419 hasConceptScore W1556555419C2777441419 @default.
• W1556555419 hasConceptScore W1556555419C2779227376 @default.
• W1556555419 hasConceptScore W1556555419C41008148 @default.
• W1556555419 hasConceptScore W1556555419C53524968 @default.
• W1556555419 hasConceptScore W1556555419C62520636 @default.
• W1556555419 hasConceptScore W1556555419C62611344 @default.
• W1556555419 hasConceptScore W1556555419C92630104 @default.
• W1556555419 hasConceptScore W1556555419C94263209 @default.
• W1556555419 hasConceptScore W1556555419C98045186 @default.
• W1556555419 hasLocation W15565554191 @default.

• next