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- W1556593955 abstract "This paper describes a new technique for transferring an entire wafer-level silicon membrane from one substrate to another. A 1 /spl mu/m thick silicon membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymers (i.e. wax, epoxy, or photoresist). Smaller or larger diameter membranes can also be transferred using this technique. The fabricated actuator membrane with an electrode gap of 1.50 /spl mu/m, shows a vertical deflection of 0.37 /spl mu/m at 55 V. The proposed technique has the following benefits over those previously reported: (1) No post-assembly release process (e.g. using HF) is required, and no wax, photoresist, or epoxy is used for the transfer purpose; (2) The bonded interface is completely isolated from any acid, etchant, or solvent, which ensures a clean and flat membrane surface; (3) It offers the capability of transferring wafer-level membranes over deformable actuators." @default.
- W1556593955 created "2016-06-24" @default.
- W1556593955 creator A5059114595 @default.
- W1556593955 creator A5065911241 @default.
- W1556593955 date "2002-11-13" @default.
- W1556593955 modified "2023-09-30" @default.
- W1556593955 title "A new wafer-level membrane transfer technique for MEMS deformable mirrors" @default.
- W1556593955 cites W1574423645 @default.
- W1556593955 cites W1984796508 @default.
- W1556593955 cites W2031480071 @default.
- W1556593955 cites W2067688866 @default.
- W1556593955 cites W2076957013 @default.
- W1556593955 cites W2091799397 @default.
- W1556593955 cites W2104948308 @default.
- W1556593955 cites W2118680250 @default.
- W1556593955 cites W2130720371 @default.
- W1556593955 cites W2131876092 @default.
- W1556593955 cites W2147628985 @default.
- W1556593955 cites W2160757754 @default.
- W1556593955 cites W1988563888 @default.
- W1556593955 doi "https://doi.org/10.1109/memsys.2001.906483" @default.
- W1556593955 hasPublicationYear "2002" @default.
- W1556593955 type Work @default.
- W1556593955 sameAs 1556593955 @default.
- W1556593955 citedByCount "5" @default.
- W1556593955 countsByYear W15565939552014 @default.
- W1556593955 crossrefType "proceedings-article" @default.
- W1556593955 hasAuthorship W1556593955A5059114595 @default.
- W1556593955 hasAuthorship W1556593955A5065911241 @default.
- W1556593955 hasConcept C119599485 @default.
- W1556593955 hasConcept C120665830 @default.
- W1556593955 hasConcept C121332964 @default.
- W1556593955 hasConcept C127413603 @default.
- W1556593955 hasConcept C134406635 @default.
- W1556593955 hasConcept C147789679 @default.
- W1556593955 hasConcept C159985019 @default.
- W1556593955 hasConcept C160671074 @default.
- W1556593955 hasConcept C166595027 @default.
- W1556593955 hasConcept C172707124 @default.
- W1556593955 hasConcept C17525397 @default.
- W1556593955 hasConcept C185592680 @default.
- W1556593955 hasConcept C192562407 @default.
- W1556593955 hasConcept C2779227376 @default.
- W1556593955 hasConcept C2781355719 @default.
- W1556593955 hasConcept C37977207 @default.
- W1556593955 hasConcept C41625074 @default.
- W1556593955 hasConcept C49040817 @default.
- W1556593955 hasConcept C521977710 @default.
- W1556593955 hasConcept C544956773 @default.
- W1556593955 hasConcept C55493867 @default.
- W1556593955 hasConcept C68928338 @default.
- W1556593955 hasConceptScore W1556593955C119599485 @default.
- W1556593955 hasConceptScore W1556593955C120665830 @default.
- W1556593955 hasConceptScore W1556593955C121332964 @default.
- W1556593955 hasConceptScore W1556593955C127413603 @default.
- W1556593955 hasConceptScore W1556593955C134406635 @default.
- W1556593955 hasConceptScore W1556593955C147789679 @default.
- W1556593955 hasConceptScore W1556593955C159985019 @default.
- W1556593955 hasConceptScore W1556593955C160671074 @default.
- W1556593955 hasConceptScore W1556593955C166595027 @default.
- W1556593955 hasConceptScore W1556593955C172707124 @default.
- W1556593955 hasConceptScore W1556593955C17525397 @default.
- W1556593955 hasConceptScore W1556593955C185592680 @default.
- W1556593955 hasConceptScore W1556593955C192562407 @default.
- W1556593955 hasConceptScore W1556593955C2779227376 @default.
- W1556593955 hasConceptScore W1556593955C2781355719 @default.
- W1556593955 hasConceptScore W1556593955C37977207 @default.
- W1556593955 hasConceptScore W1556593955C41625074 @default.
- W1556593955 hasConceptScore W1556593955C49040817 @default.
- W1556593955 hasConceptScore W1556593955C521977710 @default.
- W1556593955 hasConceptScore W1556593955C544956773 @default.
- W1556593955 hasConceptScore W1556593955C55493867 @default.
- W1556593955 hasConceptScore W1556593955C68928338 @default.
- W1556593955 hasLocation W15565939551 @default.
- W1556593955 hasOpenAccess W1556593955 @default.
- W1556593955 hasPrimaryLocation W15565939551 @default.
- W1556593955 hasRelatedWork W1966785162 @default.
- W1556593955 hasRelatedWork W1984711052 @default.
- W1556593955 hasRelatedWork W1997668130 @default.
- W1556593955 hasRelatedWork W2011901813 @default.
- W1556593955 hasRelatedWork W2104437432 @default.
- W1556593955 hasRelatedWork W2161990046 @default.
- W1556593955 hasRelatedWork W2166213615 @default.
- W1556593955 hasRelatedWork W2171954517 @default.
- W1556593955 hasRelatedWork W2273657440 @default.
- W1556593955 hasRelatedWork W2309817231 @default.
- W1556593955 hasRelatedWork W2411773506 @default.
- W1556593955 hasRelatedWork W2737321090 @default.
- W1556593955 hasRelatedWork W2143975788 @default.
- W1556593955 hasRelatedWork W2728875496 @default.
- W1556593955 hasRelatedWork W2747301314 @default.
- W1556593955 hasRelatedWork W2788281013 @default.
- W1556593955 hasRelatedWork W2823456812 @default.
- W1556593955 hasRelatedWork W2829155236 @default.
- W1556593955 hasRelatedWork W2861293707 @default.
- W1556593955 hasRelatedWork W2961099237 @default.
- W1556593955 isParatext "false" @default.
- W1556593955 isRetracted "false" @default.
- W1556593955 magId "1556593955" @default.
- W1556593955 workType "article" @default.