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- W1557082789 abstract "Low-k fluorocarbon films have been deposited by pulsed plasma chemical vapor deposition (CVD) and their thermal stabilities have been examined. We have observed and identified at least two mechanisms for thermal decomposition. We have been able to eliminate the most labile decomposition route by increasing substrate temperature during deposition. Enhanced decomposition due to ex-situ oxygen exposure has also been observed." @default.
- W1557082789 created "2016-06-24" @default.
- W1557082789 creator A5021901576 @default.
- W1557082789 creator A5028060884 @default.
- W1557082789 creator A5061958103 @default.
- W1557082789 creator A5070999670 @default.
- W1557082789 date "2003-01-20" @default.
- W1557082789 modified "2023-09-23" @default.
- W1557082789 title "Thermal decomposition of low-k pulsed plasma fluorocarbon films" @default.
- W1557082789 cites W1981929374 @default.
- W1557082789 cites W1983207051 @default.
- W1557082789 cites W1998707211 @default.
- W1557082789 cites W2049247626 @default.
- W1557082789 cites W2052831425 @default.
- W1557082789 cites W2502289877 @default.
- W1557082789 doi "https://doi.org/10.1109/iitc.1999.787107" @default.
- W1557082789 hasPublicationYear "2003" @default.
- W1557082789 type Work @default.
- W1557082789 sameAs 1557082789 @default.
- W1557082789 citedByCount "0" @default.
- W1557082789 crossrefType "proceedings-article" @default.
- W1557082789 hasAuthorship W1557082789A5021901576 @default.
- W1557082789 hasAuthorship W1557082789A5028060884 @default.
- W1557082789 hasAuthorship W1557082789A5061958103 @default.
- W1557082789 hasAuthorship W1557082789A5070999670 @default.
- W1557082789 hasConcept C111368507 @default.
- W1557082789 hasConcept C113196181 @default.
- W1557082789 hasConcept C121332964 @default.
- W1557082789 hasConcept C124681953 @default.
- W1557082789 hasConcept C127313418 @default.
- W1557082789 hasConcept C127413603 @default.
- W1557082789 hasConcept C151730666 @default.
- W1557082789 hasConcept C159985019 @default.
- W1557082789 hasConcept C160434732 @default.
- W1557082789 hasConcept C171250308 @default.
- W1557082789 hasConcept C178790620 @default.
- W1557082789 hasConcept C185592680 @default.
- W1557082789 hasConcept C192562407 @default.
- W1557082789 hasConcept C2776875633 @default.
- W1557082789 hasConcept C2777289219 @default.
- W1557082789 hasConcept C2816523 @default.
- W1557082789 hasConcept C42360764 @default.
- W1557082789 hasConcept C540031477 @default.
- W1557082789 hasConcept C57410435 @default.
- W1557082789 hasConcept C62520636 @default.
- W1557082789 hasConcept C64297162 @default.
- W1557082789 hasConcept C82706917 @default.
- W1557082789 hasConcept C86803240 @default.
- W1557082789 hasConceptScore W1557082789C111368507 @default.
- W1557082789 hasConceptScore W1557082789C113196181 @default.
- W1557082789 hasConceptScore W1557082789C121332964 @default.
- W1557082789 hasConceptScore W1557082789C124681953 @default.
- W1557082789 hasConceptScore W1557082789C127313418 @default.
- W1557082789 hasConceptScore W1557082789C127413603 @default.
- W1557082789 hasConceptScore W1557082789C151730666 @default.
- W1557082789 hasConceptScore W1557082789C159985019 @default.
- W1557082789 hasConceptScore W1557082789C160434732 @default.
- W1557082789 hasConceptScore W1557082789C171250308 @default.
- W1557082789 hasConceptScore W1557082789C178790620 @default.
- W1557082789 hasConceptScore W1557082789C185592680 @default.
- W1557082789 hasConceptScore W1557082789C192562407 @default.
- W1557082789 hasConceptScore W1557082789C2776875633 @default.
- W1557082789 hasConceptScore W1557082789C2777289219 @default.
- W1557082789 hasConceptScore W1557082789C2816523 @default.
- W1557082789 hasConceptScore W1557082789C42360764 @default.
- W1557082789 hasConceptScore W1557082789C540031477 @default.
- W1557082789 hasConceptScore W1557082789C57410435 @default.
- W1557082789 hasConceptScore W1557082789C62520636 @default.
- W1557082789 hasConceptScore W1557082789C64297162 @default.
- W1557082789 hasConceptScore W1557082789C82706917 @default.
- W1557082789 hasConceptScore W1557082789C86803240 @default.
- W1557082789 hasLocation W15570827891 @default.
- W1557082789 hasOpenAccess W1557082789 @default.
- W1557082789 hasPrimaryLocation W15570827891 @default.
- W1557082789 hasRelatedWork W1545990729 @default.
- W1557082789 hasRelatedWork W1664757683 @default.
- W1557082789 hasRelatedWork W1986424846 @default.
- W1557082789 hasRelatedWork W198660029 @default.
- W1557082789 hasRelatedWork W2004570185 @default.
- W1557082789 hasRelatedWork W2040200521 @default.
- W1557082789 hasRelatedWork W2040770001 @default.
- W1557082789 hasRelatedWork W2071171547 @default.
- W1557082789 hasRelatedWork W2159510868 @default.
- W1557082789 hasRelatedWork W2168316111 @default.
- W1557082789 hasRelatedWork W2980867754 @default.
- W1557082789 hasRelatedWork W49018930 @default.
- W1557082789 hasRelatedWork W1519432796 @default.
- W1557082789 hasRelatedWork W1521557389 @default.
- W1557082789 hasRelatedWork W1549439451 @default.
- W1557082789 hasRelatedWork W1549774320 @default.
- W1557082789 hasRelatedWork W1581397779 @default.
- W1557082789 hasRelatedWork W1600688109 @default.
- W1557082789 hasRelatedWork W1744048697 @default.
- W1557082789 hasRelatedWork W2519521637 @default.
- W1557082789 isParatext "false" @default.
- W1557082789 isRetracted "false" @default.
- W1557082789 magId "1557082789" @default.
- W1557082789 workType "article" @default.