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• W1557106530 abstract "Through silicon via (TSV) is a critical element for three-dimensional (3D) integration of devices in vertically multilevel stack-die microelectronic packages. In this paper, the microstructure evolution of TSV-Cu under thermal cycling was studied and the topography of TSVs under thermal cycling tests was examined by white light interferometer. It was found that the Cu was intrude inside the Si die during the test, and the intrusion height increased with cycle time and leveled off at 0.72µm and 0.53µm for upside and backside after 210 cycles, respectively. Besides, the Cu intrusion height at the Cu/Si interface is greater than that in the middle of Cu bar. in addition, cracks were observed at SiO 2 /Ta barrier interface and between BEOL line and Cu vias. It suggests that diffusional creep of the interface is the key for Cu via intrusion, the residual stress and thermal stress drive the interfacial sliding at interfaces." @default.
• W1557106530 created "2016-06-24" @default.
• W1557106530 creator A5015357235 @default.
• W1557106530 creator A5038361656 @default.
• W1557106530 creator A5061280924 @default.
• W1557106530 creator A5071981195 @default.
• W1557106530 creator A5073816051 @default.
• W1557106530 date "2015-08-01" @default.
• W1557106530 modified "2023-09-23" @default.
• W1557106530 title "The reliability of through silicon via under thermal cycling" @default.
• W1557106530 cites W1509060557 @default.
• W1557106530 cites W1973948523 @default.
• W1557106530 cites W1976573534 @default.
• W1557106530 cites W1978327009 @default.
• W1557106530 cites W1986083915 @default.
• W1557106530 cites W2001206317 @default.
• W1557106530 cites W2022454657 @default.
• W1557106530 cites W2052744616 @default.
• W1557106530 cites W2068572823 @default.
• W1557106530 cites W2078492284 @default.
• W1557106530 doi "https://doi.org/10.1109/icept.2015.7236686" @default.
• W1557106530 hasPublicationYear "2015" @default.
• W1557106530 type Work @default.
• W1557106530 sameAs 1557106530 @default.
• W1557106530 citedByCount "2" @default.
• W1557106530 countsByYear W15571065302017 @default.
• W1557106530 countsByYear W15571065302018 @default.
• W1557106530 crossrefType "proceedings-article" @default.
• W1557106530 hasAuthorship W1557106530A5015357235 @default.
• W1557106530 hasAuthorship W1557106530A5038361656 @default.
• W1557106530 hasAuthorship W1557106530A5061280924 @default.
• W1557106530 hasAuthorship W1557106530A5071981195 @default.
• W1557106530 hasAuthorship W1557106530A5073816051 @default.
• W1557106530 hasConcept C121332964 @default.
• W1557106530 hasConcept C127413603 @default.
• W1557106530 hasConcept C138885662 @default.
• W1557106530 hasConcept C149912024 @default.
• W1557106530 hasConcept C153294291 @default.
• W1557106530 hasConcept C159985019 @default.
• W1557106530 hasConcept C177564732 @default.
• W1557106530 hasConcept C187937830 @default.
• W1557106530 hasConcept C191897082 @default.
• W1557106530 hasConcept C192562407 @default.
• W1557106530 hasConcept C199360897 @default.
• W1557106530 hasConcept C204530211 @default.
• W1557106530 hasConcept C21036866 @default.
• W1557106530 hasConcept C24326235 @default.
• W1557106530 hasConcept C37292000 @default.
• W1557106530 hasConcept C41008148 @default.
• W1557106530 hasConcept C41895202 @default.
• W1557106530 hasConcept C45632049 @default.
• W1557106530 hasConcept C49040817 @default.
• W1557106530 hasConcept C544956773 @default.
• W1557106530 hasConcept C87976508 @default.
• W1557106530 hasConcept C9395851 @default.
• W1557106530 hasConceptScore W1557106530C121332964 @default.
• W1557106530 hasConceptScore W1557106530C127413603 @default.
• W1557106530 hasConceptScore W1557106530C138885662 @default.
• W1557106530 hasConceptScore W1557106530C149912024 @default.
• W1557106530 hasConceptScore W1557106530C153294291 @default.
• W1557106530 hasConceptScore W1557106530C159985019 @default.
• W1557106530 hasConceptScore W1557106530C177564732 @default.
• W1557106530 hasConceptScore W1557106530C187937830 @default.
• W1557106530 hasConceptScore W1557106530C191897082 @default.
• W1557106530 hasConceptScore W1557106530C192562407 @default.
• W1557106530 hasConceptScore W1557106530C199360897 @default.
• W1557106530 hasConceptScore W1557106530C204530211 @default.
• W1557106530 hasConceptScore W1557106530C21036866 @default.
• W1557106530 hasConceptScore W1557106530C24326235 @default.
• W1557106530 hasConceptScore W1557106530C37292000 @default.
• W1557106530 hasConceptScore W1557106530C41008148 @default.
• W1557106530 hasConceptScore W1557106530C41895202 @default.
• W1557106530 hasConceptScore W1557106530C45632049 @default.
• W1557106530 hasConceptScore W1557106530C49040817 @default.
• W1557106530 hasConceptScore W1557106530C544956773 @default.
• W1557106530 hasConceptScore W1557106530C87976508 @default.
• W1557106530 hasConceptScore W1557106530C9395851 @default.
• W1557106530 hasLocation W15571065301 @default.
• W1557106530 hasOpenAccess W1557106530 @default.
• W1557106530 hasPrimaryLocation W15571065301 @default.
• W1557106530 hasRelatedWork W1995880241 @default.
• W1557106530 hasRelatedWork W2025814221 @default.
• W1557106530 hasRelatedWork W2029490420 @default.
• W1557106530 hasRelatedWork W2061141647 @default.
• W1557106530 hasRelatedWork W2075497902 @default.
• W1557106530 hasRelatedWork W2326915737 @default.
• W1557106530 hasRelatedWork W2504956794 @default.
• W1557106530 hasRelatedWork W2738296629 @default.
• W1557106530 hasRelatedWork W2740473062 @default.
• W1557106530 hasRelatedWork W2765960251 @default.
• W1557106530 hasRelatedWork W2889018646 @default.
• W1557106530 hasRelatedWork W2901589994 @default.
• W1557106530 hasRelatedWork W2952949751 @default.
• W1557106530 hasRelatedWork W3011932739 @default.
• W1557106530 hasRelatedWork W3047480913 @default.
• W1557106530 hasRelatedWork W3088436080 @default.
• W1557106530 hasRelatedWork W3088708775 @default.
• W1557106530 hasRelatedWork W3089086775 @default.
• W1557106530 hasRelatedWork W3188033406 @default.
• W1557106530 hasRelatedWork W3209071371 @default.

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