Matches in SemOpenAlex for { <https://semopenalex.org/work/W1557223838> ?p ?o ?g. }
- W1557223838 endingPage "168" @default.
- W1557223838 startingPage "91" @default.
- W1557223838 abstract "This chapter describes the phenomena of ultraviolet nanoimprint lithography (UV-NIL) transfer process, UV-NIL machine, UV-NIL materials, and evaluation of mold and transfer resin surface. In UV-NIL, a liquid resin having a low viscosity is used, thus, the required transfer pressure is lower than that of thermal NIL. The chapter describes the self-assembled monolayer (SAM) release agent and its coating method. Resin is classified according to the polymerization system into several types: radical polymerization type, ion polymerization type, and ene-thiol type. The properties of resins with different types of curing mechanism and developmental examples are described. The chapter describes what silane coupling agents are, and explains the mechanism by which the agents modify the surface of the substrate." @default.
- W1557223838 created "2016-06-24" @default.
- W1557223838 creator A5005141184 @default.
- W1557223838 creator A5008408012 @default.
- W1557223838 creator A5014584457 @default.
- W1557223838 creator A5017394148 @default.
- W1557223838 creator A5022281977 @default.
- W1557223838 creator A5066144274 @default.
- W1557223838 creator A5078873486 @default.
- W1557223838 creator A5079279935 @default.
- W1557223838 creator A5083465926 @default.
- W1557223838 creator A5091158809 @default.
- W1557223838 date "2013-06-18" @default.
- W1557223838 modified "2023-09-25" @default.
- W1557223838 title "Ultraviolet Nanoimprint Lithography" @default.
- W1557223838 cites W1969401946 @default.
- W1557223838 cites W1973140159 @default.
- W1557223838 cites W1973599129 @default.
- W1557223838 cites W1974467082 @default.
- W1557223838 cites W1975090195 @default.
- W1557223838 cites W1975737665 @default.
- W1557223838 cites W1978414317 @default.
- W1557223838 cites W1978733559 @default.
- W1557223838 cites W1985940012 @default.
- W1557223838 cites W1994455167 @default.
- W1557223838 cites W2009881407 @default.
- W1557223838 cites W2012660054 @default.
- W1557223838 cites W2014324377 @default.
- W1557223838 cites W2014732971 @default.
- W1557223838 cites W2015604846 @default.
- W1557223838 cites W2016747575 @default.
- W1557223838 cites W2019178296 @default.
- W1557223838 cites W2022948920 @default.
- W1557223838 cites W2026184505 @default.
- W1557223838 cites W2027882727 @default.
- W1557223838 cites W2030706404 @default.
- W1557223838 cites W2035826767 @default.
- W1557223838 cites W2036364253 @default.
- W1557223838 cites W2042568125 @default.
- W1557223838 cites W2045613989 @default.
- W1557223838 cites W2050056960 @default.
- W1557223838 cites W2050584077 @default.
- W1557223838 cites W2055225903 @default.
- W1557223838 cites W2061573223 @default.
- W1557223838 cites W2062074587 @default.
- W1557223838 cites W2064403993 @default.
- W1557223838 cites W2069449491 @default.
- W1557223838 cites W2071856452 @default.
- W1557223838 cites W2072932740 @default.
- W1557223838 cites W2073119050 @default.
- W1557223838 cites W2074885628 @default.
- W1557223838 cites W2083072324 @default.
- W1557223838 cites W2089490419 @default.
- W1557223838 cites W2090026480 @default.
- W1557223838 cites W2091162135 @default.
- W1557223838 cites W2092425950 @default.
- W1557223838 cites W2095148341 @default.
- W1557223838 cites W2098559938 @default.
- W1557223838 cites W2104088528 @default.
- W1557223838 cites W2123958302 @default.
- W1557223838 cites W2124323827 @default.
- W1557223838 cites W2127270856 @default.
- W1557223838 cites W2137983853 @default.
- W1557223838 cites W2138368127 @default.
- W1557223838 cites W2159072100 @default.
- W1557223838 cites W4233213196 @default.
- W1557223838 cites W4253461579 @default.
- W1557223838 cites W2078355969 @default.
- W1557223838 doi "https://doi.org/10.1002/9781118535059.ch5" @default.
- W1557223838 hasPublicationYear "2013" @default.
- W1557223838 type Work @default.
- W1557223838 sameAs 1557223838 @default.
- W1557223838 citedByCount "0" @default.
- W1557223838 crossrefType "other" @default.
- W1557223838 hasAuthorship W1557223838A5005141184 @default.
- W1557223838 hasAuthorship W1557223838A5008408012 @default.
- W1557223838 hasAuthorship W1557223838A5014584457 @default.
- W1557223838 hasAuthorship W1557223838A5017394148 @default.
- W1557223838 hasAuthorship W1557223838A5022281977 @default.
- W1557223838 hasAuthorship W1557223838A5066144274 @default.
- W1557223838 hasAuthorship W1557223838A5078873486 @default.
- W1557223838 hasAuthorship W1557223838A5079279935 @default.
- W1557223838 hasAuthorship W1557223838A5083465926 @default.
- W1557223838 hasAuthorship W1557223838A5091158809 @default.
- W1557223838 hasConcept C105487726 @default.
- W1557223838 hasConcept C127413603 @default.
- W1557223838 hasConcept C132976073 @default.
- W1557223838 hasConcept C136525101 @default.
- W1557223838 hasConcept C142724271 @default.
- W1557223838 hasConcept C159985019 @default.
- W1557223838 hasConcept C171250308 @default.
- W1557223838 hasConcept C188027245 @default.
- W1557223838 hasConcept C192562407 @default.
- W1557223838 hasConcept C204223013 @default.
- W1557223838 hasConcept C204787440 @default.
- W1557223838 hasConcept C2776798109 @default.
- W1557223838 hasConcept C2777046567 @default.
- W1557223838 hasConcept C2777682490 @default.