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- W1558813888 abstract "We have achieved 1.6 M/spl Omega/-cm resistivity using ion implantation that has little negative effect on MOS devices. Extremely low loss and cross coupling of 6.3 and -79 dB/cm (10 /spl mu/m gap) at 20 GHz are measured with 1 /spl mu/m Al, respectively, which is due to implant induced trap with /spl sim/1 ps carrier lifetime and stable to 400/spl deg/C." @default.
- W1558813888 created "2016-06-24" @default.
- W1558813888 creator A5008237233 @default.
- W1558813888 creator A5009736513 @default.
- W1558813888 creator A5011466338 @default.
- W1558813888 creator A5013801829 @default.
- W1558813888 creator A5033461040 @default.
- W1558813888 creator A5044477593 @default.
- W1558813888 creator A5074325217 @default.
- W1558813888 date "2002-11-07" @default.
- W1558813888 modified "2023-10-18" @default.
- W1558813888 title "RF loss and crosstalk on extremely high resistivity (10 k-1 MΩ-cm) Si fabricated by ion implantation" @default.
- W1558813888 cites W1832220798 @default.
- W1558813888 cites W1923520124 @default.
- W1558813888 cites W1991991568 @default.
- W1558813888 cites W2135891322 @default.
- W1558813888 cites W2143261085 @default.
- W1558813888 cites W2164327002 @default.
- W1558813888 doi "https://doi.org/10.1109/mwsym.2000.860951" @default.
- W1558813888 hasPublicationYear "2002" @default.
- W1558813888 type Work @default.
- W1558813888 sameAs 1558813888 @default.
- W1558813888 citedByCount "21" @default.
- W1558813888 crossrefType "proceedings-article" @default.
- W1558813888 hasAuthorship W1558813888A5008237233 @default.
- W1558813888 hasAuthorship W1558813888A5009736513 @default.
- W1558813888 hasAuthorship W1558813888A5011466338 @default.
- W1558813888 hasAuthorship W1558813888A5013801829 @default.
- W1558813888 hasAuthorship W1558813888A5033461040 @default.
- W1558813888 hasAuthorship W1558813888A5044477593 @default.
- W1558813888 hasAuthorship W1558813888A5074325217 @default.
- W1558813888 hasConcept C113196181 @default.
- W1558813888 hasConcept C119599485 @default.
- W1558813888 hasConcept C120665830 @default.
- W1558813888 hasConcept C121332964 @default.
- W1558813888 hasConcept C127413603 @default.
- W1558813888 hasConcept C145148216 @default.
- W1558813888 hasConcept C169822122 @default.
- W1558813888 hasConcept C178790620 @default.
- W1558813888 hasConcept C184779094 @default.
- W1558813888 hasConcept C185592680 @default.
- W1558813888 hasConcept C192562407 @default.
- W1558813888 hasConcept C2779557605 @default.
- W1558813888 hasConcept C41823505 @default.
- W1558813888 hasConcept C43617362 @default.
- W1558813888 hasConcept C49040817 @default.
- W1558813888 hasConcept C62520636 @default.
- W1558813888 hasConcept C69990965 @default.
- W1558813888 hasConceptScore W1558813888C113196181 @default.
- W1558813888 hasConceptScore W1558813888C119599485 @default.
- W1558813888 hasConceptScore W1558813888C120665830 @default.
- W1558813888 hasConceptScore W1558813888C121332964 @default.
- W1558813888 hasConceptScore W1558813888C127413603 @default.
- W1558813888 hasConceptScore W1558813888C145148216 @default.
- W1558813888 hasConceptScore W1558813888C169822122 @default.
- W1558813888 hasConceptScore W1558813888C178790620 @default.
- W1558813888 hasConceptScore W1558813888C184779094 @default.
- W1558813888 hasConceptScore W1558813888C185592680 @default.
- W1558813888 hasConceptScore W1558813888C192562407 @default.
- W1558813888 hasConceptScore W1558813888C2779557605 @default.
- W1558813888 hasConceptScore W1558813888C41823505 @default.
- W1558813888 hasConceptScore W1558813888C43617362 @default.
- W1558813888 hasConceptScore W1558813888C49040817 @default.
- W1558813888 hasConceptScore W1558813888C62520636 @default.
- W1558813888 hasConceptScore W1558813888C69990965 @default.
- W1558813888 hasLocation W15588138881 @default.
- W1558813888 hasOpenAccess W1558813888 @default.
- W1558813888 hasPrimaryLocation W15588138881 @default.
- W1558813888 hasRelatedWork W1537557875 @default.
- W1558813888 hasRelatedWork W1667259387 @default.
- W1558813888 hasRelatedWork W1716351663 @default.
- W1558813888 hasRelatedWork W1818431228 @default.
- W1558813888 hasRelatedWork W1984328136 @default.
- W1558813888 hasRelatedWork W2096942834 @default.
- W1558813888 hasRelatedWork W2099960220 @default.
- W1558813888 hasRelatedWork W2100453009 @default.
- W1558813888 hasRelatedWork W2112928135 @default.
- W1558813888 hasRelatedWork W2115422842 @default.
- W1558813888 hasRelatedWork W2117701252 @default.
- W1558813888 hasRelatedWork W2120458812 @default.
- W1558813888 hasRelatedWork W2139975605 @default.
- W1558813888 hasRelatedWork W2143041157 @default.
- W1558813888 hasRelatedWork W2144957635 @default.
- W1558813888 hasRelatedWork W2157175234 @default.
- W1558813888 hasRelatedWork W2158446922 @default.
- W1558813888 hasRelatedWork W2164699630 @default.
- W1558813888 hasRelatedWork W2535209882 @default.
- W1558813888 hasRelatedWork W2546565204 @default.
- W1558813888 isParatext "false" @default.
- W1558813888 isRetracted "false" @default.
- W1558813888 magId "1558813888" @default.
- W1558813888 workType "article" @default.