Matches in SemOpenAlex for { <https://semopenalex.org/work/W1558906694> ?p ?o ?g. }
- W1558906694 abstract "The microwave coupling efficiency of the 2.45 GHz, microwave plasma assisted diamond synthesis process is investigated by experimentally measuring the performance of a specific single mode excited, internally tuned microwave plasma reactor. Plasma reactor coupling efficiencies (η) > 90% are achieved over the entire 100-260 Torr pressure range and 1.5-2.4 kW input power diamond synthesis regime. When operating at a specific experimental operating condition, small additional internal tuning adjustments can be made to achieve η > 98%. When the plasma reactor has low empty cavity losses, i.e., the empty cavity quality factor is >1500, then overall microwave discharge coupling efficiencies (η(coup)) of >94% can be achieved. A large, safe, and efficient experimental operating regime is identified. Both substrate hot spots and the formation of microwave plasmoids are eliminated when operating within this regime. This investigation suggests that both the reactor design and the reactor process operation must be considered when attempting to lower diamond synthesis electrical energy costs while still enabling a very versatile and flexible operation performance." @default.
- W1558906694 created "2016-06-24" @default.
- W1558906694 creator A5004192787 @default.
- W1558906694 creator A5045362221 @default.
- W1558906694 creator A5090599588 @default.
- W1558906694 date "2015-07-01" @default.
- W1558906694 modified "2023-10-18" @default.
- W1558906694 title "Determining the microwave coupling and operational efficiencies of a microwave plasma assisted chemical vapor deposition reactor under high pressure diamond synthesis operating conditions" @default.
- W1558906694 cites W1963656915 @default.
- W1558906694 cites W1966968872 @default.
- W1558906694 cites W1972880449 @default.
- W1558906694 cites W1973894293 @default.
- W1558906694 cites W1977404451 @default.
- W1558906694 cites W1978478307 @default.
- W1558906694 cites W1981164074 @default.
- W1558906694 cites W1983260608 @default.
- W1558906694 cites W1983402117 @default.
- W1558906694 cites W1985342611 @default.
- W1558906694 cites W1987884171 @default.
- W1558906694 cites W2001236033 @default.
- W1558906694 cites W2013692760 @default.
- W1558906694 cites W2017136220 @default.
- W1558906694 cites W2017871928 @default.
- W1558906694 cites W2018129529 @default.
- W1558906694 cites W2018266149 @default.
- W1558906694 cites W2019065872 @default.
- W1558906694 cites W2022998007 @default.
- W1558906694 cites W2024707364 @default.
- W1558906694 cites W2026197786 @default.
- W1558906694 cites W2027143733 @default.
- W1558906694 cites W2027306040 @default.
- W1558906694 cites W2031033704 @default.
- W1558906694 cites W2032573740 @default.
- W1558906694 cites W2038155398 @default.
- W1558906694 cites W2039823720 @default.
- W1558906694 cites W2040889858 @default.
- W1558906694 cites W2045117334 @default.
- W1558906694 cites W2048705218 @default.
- W1558906694 cites W2049890483 @default.
- W1558906694 cites W2052906499 @default.
- W1558906694 cites W2055207477 @default.
- W1558906694 cites W2056360079 @default.
- W1558906694 cites W2056482159 @default.
- W1558906694 cites W2059463276 @default.
- W1558906694 cites W2064212054 @default.
- W1558906694 cites W2066631011 @default.
- W1558906694 cites W2074287296 @default.
- W1558906694 cites W2083661928 @default.
- W1558906694 cites W2084529687 @default.
- W1558906694 cites W2087225629 @default.
- W1558906694 cites W2087697186 @default.
- W1558906694 cites W2091898850 @default.
- W1558906694 cites W2092910399 @default.
- W1558906694 cites W2093757203 @default.
- W1558906694 cites W2095254916 @default.
- W1558906694 cites W2108116876 @default.
- W1558906694 cites W2130860281 @default.
- W1558906694 cites W2144644456 @default.
- W1558906694 cites W4300792422 @default.
- W1558906694 cites W599198648 @default.
- W1558906694 doi "https://doi.org/10.1063/1.4923092" @default.
- W1558906694 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/26233399" @default.
- W1558906694 hasPublicationYear "2015" @default.
- W1558906694 type Work @default.
- W1558906694 sameAs 1558906694 @default.
- W1558906694 citedByCount "13" @default.
- W1558906694 countsByYear W15589066942015 @default.
- W1558906694 countsByYear W15589066942016 @default.
- W1558906694 countsByYear W15589066942017 @default.
- W1558906694 countsByYear W15589066942021 @default.
- W1558906694 countsByYear W15589066942023 @default.
- W1558906694 crossrefType "journal-article" @default.
- W1558906694 hasAuthorship W1558906694A5004192787 @default.
- W1558906694 hasAuthorship W1558906694A5045362221 @default.
- W1558906694 hasAuthorship W1558906694A5090599588 @default.
- W1558906694 hasConcept C116915560 @default.
- W1558906694 hasConcept C121332964 @default.
- W1558906694 hasConcept C127413603 @default.
- W1558906694 hasConcept C131584629 @default.
- W1558906694 hasConcept C159985019 @default.
- W1558906694 hasConcept C188224857 @default.
- W1558906694 hasConcept C191897082 @default.
- W1558906694 hasConcept C192562407 @default.
- W1558906694 hasConcept C2776921476 @default.
- W1558906694 hasConcept C30646810 @default.
- W1558906694 hasConcept C44838205 @default.
- W1558906694 hasConcept C49040817 @default.
- W1558906694 hasConcept C57410435 @default.
- W1558906694 hasConcept C62520636 @default.
- W1558906694 hasConcept C70420769 @default.
- W1558906694 hasConcept C82706917 @default.
- W1558906694 hasConcept C97355855 @default.
- W1558906694 hasConceptScore W1558906694C116915560 @default.
- W1558906694 hasConceptScore W1558906694C121332964 @default.
- W1558906694 hasConceptScore W1558906694C127413603 @default.
- W1558906694 hasConceptScore W1558906694C131584629 @default.
- W1558906694 hasConceptScore W1558906694C159985019 @default.
- W1558906694 hasConceptScore W1558906694C188224857 @default.
- W1558906694 hasConceptScore W1558906694C191897082 @default.
- W1558906694 hasConceptScore W1558906694C192562407 @default.