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- W1560686375 abstract "The films of nominal composition Pb(Zr0.52Ti0.48)O3 (PZT) in the thickness range of 0.4–6.0 µm were fabricated on Pt/Ti/SiO2/Si substrate using a pulsed laser deposition (PLD). The PZT films were deposited in a single process at 500°C and post annealed at 650°C in oxygen atmosphere. The variations in preferred orientation and microstructure were determined as a function of film thickness. The transition of preferred orientation and microstructure influenced dielectric property. Ferroelectric and dielectric properties were maximized at the film thickness of 2.0 µm. The maximum values of remnant polarization and dielectric constant were 38 µm µC/cm2 and 1380, respectively." @default.
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- W1560686375 date "2002-06-15" @default.
- W1560686375 modified "2023-10-06" @default.
- W1560686375 title "Thickness Dependence of Pb(Zr<sub>0.52</sub>Ti<sub>0.48</sub>)O<sub>3</sub>Films Prepared by Pulsed Laser Deposition" @default.
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- W1560686375 doi "https://doi.org/10.1143/jjap.41.3817" @default.
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