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• W1562210580 abstract "Vanadium dioxide (VO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> ) is a unique phase change material (PCM) that possesses a metal-to-insulator transition property. Pristine VO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> has a negative temperature coefficient of resistance, and it undergoes an insulator-to-metal phase change at a transition temperature of 68 °C. Such a property makes the VO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> thin-film-based variable resistor (varistor) a good candidate in reconfigurable electronics to be integrated with different RF devices such as inductors, varactors, and antennas. Series single-pole single-throw (SPST) switches with integrated VO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> thin films were designed, fabricated, and tested. The overall size of the device is 380 μm × 600 μm. The SPST switches were fabricated on a sapphire substrate with integrated heating coil to control VO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> phase change. During the test, when VO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> thin film changed from insulator at room temperature to metallic state (low-resistive phase) at 80 °C, the insertion loss of the SPST switch was <;3 dB at 10 GHz. In addition, the isolation of the SPST improved to better than 30 dB when the temperature dropped to 20 °C. These tunable characteristics of the RF switch provide evidence for VO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> as a useful PCM for the broad range of applications in reconfigurable electronics." @default.
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• W1562210580 date "2015-09-01" @default.
• W1562210580 modified "2023-10-18" @default.
• W1562210580 title "Vanadium Oxide Thin-Film Variable Resistor-Based RF Switches" @default.
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• W1562210580 doi "https://doi.org/10.1109/ted.2015.2451993" @default.
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