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- W1562528305 abstract "Summary form only. A new photo-cleaning technique of organic contamination on silicon wafers utilizing excimer lamps has been developed. A decomposition rate of 20 /spl mu/g/min/spl middot/cm/sup 2/ has been achieved." @default.
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- W1562528305 date "2002-11-11" @default.
- W1562528305 modified "2023-09-24" @default.
- W1562528305 title "A new of photo-cleaning technique for semiconductor wafers with vacuum ultraviolet excimer lamps" @default.
- W1562528305 doi "https://doi.org/10.1109/cleoe.2000.910073" @default.
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