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- W1562685281 abstract "In this paper, a 2-degree-of-freedom (DOF) Micro-electro-mechanical systems(MEMS) scanning micromirror array is fabricated, which has a large area mirror, a large actuation displacement and high fill factor. Each mirror is designed for independent actuation to two axis. The mirrror is designed as leverage structure in order to achieve large actuation angle with electrostatic actuator. To achieve this, a vertical combdrive actuator is fabricated with leverage structure. The tilting angles are 9.87 ° and 9.76 ° for each axis at the voltage of 150 V. The high fill factor is accomplished by fabricating actuator under the mirror plate. The array is composed of 9 single mirrors with 3 by 3 matrices, of which the size is 1 ㎜ by 1 ㎜. The fill factor of mirror array is 84 %." @default.
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- W1562685281 date "2010-07-01" @default.
- W1562685281 modified "2023-09-23" @default.
- W1562685281 title "Fabrication of a large scanning micromirror array using vertical combdrive actuator" @default.
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