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- W1563702389 abstract "A novel microwire technology has been developed to fabricate 3-dimensional structures for use in ultracompact GaAs MMICs. By folding metal into a U-shaped wall and burying it in a relatively thick polyimide insulator, vertical microwires can be made with both greatly reduced process complexity and process compatibility with multi-level interconnects. The proposed microwires are suitable for miniature transmission lines, miniature inductors, shielding walls, and multi-function passive elements like baluns and couplers." @default.
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- W1563702389 date "2002-12-23" @default.
- W1563702389 modified "2023-09-27" @default.
- W1563702389 title "Folded U-shaped microwire technology for ultra-compact 3D MMICs" @default.
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- W1563702389 doi "https://doi.org/10.1109/mwsym.1996.511234" @default.
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