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- W1565227675 startingPage "3016" @default.
- W1565227675 abstract "A new etching solution, aqueous potassium peroxodisulfate, was developed for etching . The peroxodisulfate ion is a powerful oxidizing reagent which can extract two electrons and oxidize the surface. Because this solution is acidic with pH value of 2, it can dissolve the oxidized product. The most significant feature of the solution is that its etching rate is extremely slow, i.e., 150 Å/min, and can be further reduced by adding to the solution. It is found that adding does not enhance the etching rate but does significantly improve the morphology of the etched surface." @default.
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- W1565227675 date "1985-12-01" @default.
- W1565227675 modified "2023-09-23" @default.
- W1565227675 title "The Etching Characteristics of (100) GaAs by K 2 S 2 O 8 ‐ H 2 O System" @default.
- W1565227675 doi "https://doi.org/10.1149/1.2113714" @default.
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