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- W1565404487 abstract "3D Patterning of Si Micro and Nano Structures by Focused Ion Beam Implantation, Si Deposition and Selective Si Etching" @default.
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- W1565404487 date "2012-01-01" @default.
- W1565404487 modified "2023-09-27" @default.
- W1565404487 title "3D Patterning of Si Micro and Nano Structures by Focused Ion Beam Implantation, Si Deposition and Selective Si Etching" @default.
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