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- W1565440003 abstract "SrRuO 3 /LaNiO 3 doubly-stacked bottom electrodes were prepared on (111)Pt/TiO 2 /SiO 2 /(100)Si substrates by rf magnetron sputter deposition and impact of the additional SrRuO 3 layer on the characteristics of c-axis-oriented CaBi 4 Ti 4 O 15 films deposited on them was investigated. Crystallinity of CaBi 4 Ti 4 O 15 films was increased by inserting SrRuO 3 layer compared with those on LaNiO 3 /Pt substrates remaining c-axis preferred orientation. As a result, the relative dielectric constant of CaBi 4 Ti 4 O 15 films was improved from 150 to 220, response to the increase of crystallinity, while other characteristics, surface morphology and roughness, were hardly affected. Therefore, additional SrRuO 3 layer on LaNiO 3 /Pt substrates is effective as bottom electrode to increase the crystallinity of the dielectric thin films deposited on them." @default.
- W1565440003 created "2016-06-24" @default.
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- W1565440003 date "2012-04-25" @default.
- W1565440003 modified "2023-09-23" @default.
- W1565440003 title "Impact of SrRuO3 /LaNiO3 Doubly-Stacked Bottom Electrode on the Characteristics of c-Axis-Oriented CaBi4 Ti4 O15 Films" @default.
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- W1565440003 doi "https://doi.org/10.1002/9781118408162.ch17" @default.
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