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• W1565683513 abstract "A micromachined magnetic field sensor has been designed, fabricated and tested. Its principle of operation is based on the change of resonant frequency of a magnetically sensitive micromechanical resonator as a function of applied external magnetic field. Magnetic sensitivity is achieved by incorporating magnetically soft (permeable) or hard (permanent magnet) materials into the resonator structure. The fabrication of these devices is based on electroplating through sacrificial molds and is completely CMOS-compatible. The functionality of the device has been demonstrated as both an intensity sensor and an angular sensor (i.e., compass). The intensity sensor demonstrated a sensitivity of 20 Oersted in magnetic field intensity, while the angular sensor demonstrated a resolution of approximately 20 degrees. Performance improvements are expected upon integration of these devices with appropriate circuitry." @default.
• W1565683513 created "2016-06-24" @default.
• W1565683513 creator A5001747403 @default.
• W1565683513 creator A5024864686 @default.
• W1565683513 creator A5061931579 @default.
• W1565683513 date "2002-11-13" @default.
• W1565683513 modified "2023-10-17" @default.
• W1565683513 title "A micromachined resonant magnetic field sensor" @default.
• W1565683513 cites W2124991176 @default.
• W1565683513 cites W2168007392 @default.
• W1565683513 cites W2539096236 @default.
• W1565683513 doi "https://doi.org/10.1109/memsys.2001.906531" @default.
• W1565683513 hasPublicationYear "2002" @default.
• W1565683513 type Work @default.
• W1565683513 sameAs 1565683513 @default.
• W1565683513 citedByCount "10" @default.
• W1565683513 countsByYear W15656835132012 @default.
• W1565683513 countsByYear W15656835132016 @default.
• W1565683513 countsByYear W15656835132021 @default.
• W1565683513 crossrefType "proceedings-article" @default.
• W1565683513 hasAuthorship W1565683513A5001747403 @default.
• W1565683513 hasAuthorship W1565683513A5024864686 @default.
• W1565683513 hasAuthorship W1565683513A5061931579 @default.
• W1565683513 hasBestOaLocation W15656835132 @default.
• W1565683513 hasConcept C115260700 @default.
• W1565683513 hasConcept C119599485 @default.
• W1565683513 hasConcept C120665830 @default.
• W1565683513 hasConcept C121332964 @default.
• W1565683513 hasConcept C127413603 @default.
• W1565683513 hasConcept C136525101 @default.
• W1565683513 hasConcept C142724271 @default.
• W1565683513 hasConcept C145667562 @default.
• W1565683513 hasConcept C153946474 @default.
• W1565683513 hasConcept C16389437 @default.
• W1565683513 hasConcept C171250308 @default.
• W1565683513 hasConcept C192562407 @default.
• W1565683513 hasConcept C204787440 @default.
• W1565683513 hasConcept C21200559 @default.
• W1565683513 hasConcept C24326235 @default.
• W1565683513 hasConcept C24890656 @default.
• W1565683513 hasConcept C2778361833 @default.
• W1565683513 hasConcept C2779227376 @default.
• W1565683513 hasConcept C46362747 @default.
• W1565683513 hasConcept C49040817 @default.
• W1565683513 hasConcept C51807945 @default.
• W1565683513 hasConcept C62520636 @default.
• W1565683513 hasConcept C71924100 @default.
• W1565683513 hasConcept C93038891 @default.
• W1565683513 hasConcept C97126364 @default.
• W1565683513 hasConceptScore W1565683513C115260700 @default.
• W1565683513 hasConceptScore W1565683513C119599485 @default.
• W1565683513 hasConceptScore W1565683513C120665830 @default.
• W1565683513 hasConceptScore W1565683513C121332964 @default.
• W1565683513 hasConceptScore W1565683513C127413603 @default.
• W1565683513 hasConceptScore W1565683513C136525101 @default.
• W1565683513 hasConceptScore W1565683513C142724271 @default.
• W1565683513 hasConceptScore W1565683513C145667562 @default.
• W1565683513 hasConceptScore W1565683513C153946474 @default.
• W1565683513 hasConceptScore W1565683513C16389437 @default.
• W1565683513 hasConceptScore W1565683513C171250308 @default.
• W1565683513 hasConceptScore W1565683513C192562407 @default.
• W1565683513 hasConceptScore W1565683513C204787440 @default.
• W1565683513 hasConceptScore W1565683513C21200559 @default.
• W1565683513 hasConceptScore W1565683513C24326235 @default.
• W1565683513 hasConceptScore W1565683513C24890656 @default.
• W1565683513 hasConceptScore W1565683513C2778361833 @default.
• W1565683513 hasConceptScore W1565683513C2779227376 @default.
• W1565683513 hasConceptScore W1565683513C46362747 @default.
• W1565683513 hasConceptScore W1565683513C49040817 @default.
• W1565683513 hasConceptScore W1565683513C51807945 @default.
• W1565683513 hasConceptScore W1565683513C62520636 @default.
• W1565683513 hasConceptScore W1565683513C71924100 @default.
• W1565683513 hasConceptScore W1565683513C93038891 @default.
• W1565683513 hasConceptScore W1565683513C97126364 @default.
• W1565683513 hasLocation W15656835131 @default.
• W1565683513 hasLocation W15656835132 @default.
• W1565683513 hasOpenAccess W1565683513 @default.
• W1565683513 hasPrimaryLocation W15656835131 @default.
• W1565683513 hasRelatedWork W1977787595 @default.
• W1565683513 hasRelatedWork W2042154464 @default.
• W1565683513 hasRelatedWork W2056777212 @default.
• W1565683513 hasRelatedWork W2068766871 @default.
• W1565683513 hasRelatedWork W2113095912 @default.
• W1565683513 hasRelatedWork W2113201398 @default.
• W1565683513 hasRelatedWork W2913298224 @default.
• W1565683513 hasRelatedWork W3036696803 @default.
• W1565683513 hasRelatedWork W3119734125 @default.
• W1565683513 hasRelatedWork W1545003179 @default.
• W1565683513 hasRelatedWork W1589518520 @default.
• W1565683513 hasRelatedWork W2222270060 @default.
• W1565683513 hasRelatedWork W2272209309 @default.
• W1565683513 hasRelatedWork W2303731278 @default.
• W1565683513 hasRelatedWork W2397513706 @default.
• W1565683513 hasRelatedWork W2405047046 @default.
• W1565683513 hasRelatedWork W2626683345 @default.
• W1565683513 hasRelatedWork W52302590 @default.
• W1565683513 hasRelatedWork W68092631 @default.
• W1565683513 hasRelatedWork W70741434 @default.
• W1565683513 isParatext "false" @default.
• W1565683513 isRetracted "false" @default.

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