Matches in SemOpenAlex for { <https://semopenalex.org/work/W1565841711> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W1565841711 abstract "As CMOS devices are scaled to sub-100 nm region, dopant loss during silicide anneal becomes a critical issue. Reducing the thermal budget for silicide anneal is desirable to minimize the dopant loss from source/drain and polysilicon gate. With ternary silicide Co/sub x/Ni/sub 1-x/Si/sub 2/, a relatively low anneal temperature can be used to achieve the disilicide phase with a comparable resistance value to CoSi/sub 2/. In this report, the sheet resistance of Co/sub x/N/sub 1-x/Si/sub 2/ (x=1-0.5) at different anneal temperatures has been studied. The dopant redistribution and loss during Co/sub x/Ni/sub 1-x/Si/sub 2/ formation were characterized by secondary ion mass spectrometry (SIMS). In addition, the phase structures of Co/sub x/Ni/sub 1-x/Si/sub 2/ formed were also compared by X-ray diffraction (XRD). The results indicate that an optimal silicide process with low thermal budget can be achieved in ternary silicide Co/sub x/Ni/sub 1-x/Si/sub 2/ structures to reduce dopant loss at source/drain junctions and poly gate, while keeping silicide resistance low." @default.
- W1565841711 created "2016-06-24" @default.
- W1565841711 creator A5011657113 @default.
- W1565841711 creator A5043613882 @default.
- W1565841711 creator A5044828015 @default.
- W1565841711 creator A5047502953 @default.
- W1565841711 creator A5056027515 @default.
- W1565841711 creator A5075674918 @default.
- W1565841711 creator A5079033229 @default.
- W1565841711 creator A5084389376 @default.
- W1565841711 date "2003-10-01" @default.
- W1565841711 modified "2023-09-27" @default.
- W1565841711 title "Dopant redistribution and loss during ternary silicide Co/sub x/Ni/sub 1-x/Si/sub 2/ formation" @default.
- W1565841711 cites W1990606449 @default.
- W1565841711 cites W2079166637 @default.
- W1565841711 cites W2128504316 @default.
- W1565841711 doi "https://doi.org/10.1109/asmc.2003.1194489" @default.
- W1565841711 hasPublicationYear "2003" @default.
- W1565841711 type Work @default.
- W1565841711 sameAs 1565841711 @default.
- W1565841711 citedByCount "1" @default.
- W1565841711 crossrefType "proceedings-article" @default.
- W1565841711 hasAuthorship W1565841711A5011657113 @default.
- W1565841711 hasAuthorship W1565841711A5043613882 @default.
- W1565841711 hasAuthorship W1565841711A5044828015 @default.
- W1565841711 hasAuthorship W1565841711A5047502953 @default.
- W1565841711 hasAuthorship W1565841711A5056027515 @default.
- W1565841711 hasAuthorship W1565841711A5075674918 @default.
- W1565841711 hasAuthorship W1565841711A5079033229 @default.
- W1565841711 hasAuthorship W1565841711A5084389376 @default.
- W1565841711 hasConcept C113196181 @default.
- W1565841711 hasConcept C145148216 @default.
- W1565841711 hasConcept C171250308 @default.
- W1565841711 hasConcept C173118649 @default.
- W1565841711 hasConcept C178790620 @default.
- W1565841711 hasConcept C185592680 @default.
- W1565841711 hasConcept C191897082 @default.
- W1565841711 hasConcept C191952053 @default.
- W1565841711 hasConcept C192562407 @default.
- W1565841711 hasConcept C199360897 @default.
- W1565841711 hasConcept C2777855556 @default.
- W1565841711 hasConcept C2779227376 @default.
- W1565841711 hasConcept C2780081452 @default.
- W1565841711 hasConcept C2780901251 @default.
- W1565841711 hasConcept C41008148 @default.
- W1565841711 hasConcept C43617362 @default.
- W1565841711 hasConcept C49040817 @default.
- W1565841711 hasConcept C544956773 @default.
- W1565841711 hasConcept C57863236 @default.
- W1565841711 hasConcept C64452783 @default.
- W1565841711 hasConcept C66825105 @default.
- W1565841711 hasConcept C77671233 @default.
- W1565841711 hasConceptScore W1565841711C113196181 @default.
- W1565841711 hasConceptScore W1565841711C145148216 @default.
- W1565841711 hasConceptScore W1565841711C171250308 @default.
- W1565841711 hasConceptScore W1565841711C173118649 @default.
- W1565841711 hasConceptScore W1565841711C178790620 @default.
- W1565841711 hasConceptScore W1565841711C185592680 @default.
- W1565841711 hasConceptScore W1565841711C191897082 @default.
- W1565841711 hasConceptScore W1565841711C191952053 @default.
- W1565841711 hasConceptScore W1565841711C192562407 @default.
- W1565841711 hasConceptScore W1565841711C199360897 @default.
- W1565841711 hasConceptScore W1565841711C2777855556 @default.
- W1565841711 hasConceptScore W1565841711C2779227376 @default.
- W1565841711 hasConceptScore W1565841711C2780081452 @default.
- W1565841711 hasConceptScore W1565841711C2780901251 @default.
- W1565841711 hasConceptScore W1565841711C41008148 @default.
- W1565841711 hasConceptScore W1565841711C43617362 @default.
- W1565841711 hasConceptScore W1565841711C49040817 @default.
- W1565841711 hasConceptScore W1565841711C544956773 @default.
- W1565841711 hasConceptScore W1565841711C57863236 @default.
- W1565841711 hasConceptScore W1565841711C64452783 @default.
- W1565841711 hasConceptScore W1565841711C66825105 @default.
- W1565841711 hasConceptScore W1565841711C77671233 @default.
- W1565841711 hasLocation W15658417111 @default.
- W1565841711 hasOpenAccess W1565841711 @default.
- W1565841711 hasPrimaryLocation W15658417111 @default.
- W1565841711 hasRelatedWork W1972371445 @default.
- W1565841711 hasRelatedWork W2017509944 @default.
- W1565841711 hasRelatedWork W2019308134 @default.
- W1565841711 hasRelatedWork W2035092718 @default.
- W1565841711 hasRelatedWork W2035705314 @default.
- W1565841711 hasRelatedWork W2077714835 @default.
- W1565841711 hasRelatedWork W2080174962 @default.
- W1565841711 hasRelatedWork W2151482422 @default.
- W1565841711 hasRelatedWork W2161735224 @default.
- W1565841711 hasRelatedWork W2331720912 @default.
- W1565841711 isParatext "false" @default.
- W1565841711 isRetracted "false" @default.
- W1565841711 magId "1565841711" @default.
- W1565841711 workType "article" @default.