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- W1565852700 abstract "For complex and large-scale semiconductor manufacturing systems, using real devices for system integration and testing not only increases the cost but also takes a longer time. In this paper, a systematic approach for the emulator design of the manufacturing equipment to achieve system integration is proposed. In the proposed approach, the integration definition language 0 (IDEF0) and Petri net (PN) are applied to perform the functional and behavior analyses of the equipment, and then a verified PN model can be obtained for the implementation of emulators. An application of a rapid thermal process (RTP) in semiconductor manufacturing systems is provided to illustrate the design procedure of the developed approach." @default.
- W1565852700 created "2016-06-24" @default.
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- W1565852700 date "2004-04-23" @default.
- W1565852700 modified "2023-09-26" @default.
- W1565852700 title "An IDEF0/Petri net approach to the system integration in semiconductor manufacturing systems" @default.
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- W1565852700 doi "https://doi.org/10.1109/icsmc.2003.1245760" @default.
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