FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1566008596> ?p ?o ?g. }

• W1566008596 abstract "This paper gives a detail description of a silicon vibration beam accelerometer which was fabricated by SOI technology and encapsulated in a wafer level vacuum package. The wafer level package gives advantage of small size and low cost, but also produce additional residual stresses that increased the temperature coefficient of the vibration beams. To solve this problem, the sensing structure was redesigned and reduce the temperature coefficient from 50Hz/℃ to 10Hz/℃. Moreover, with carefully assembly, control and measure technology, the accelerometer system achieved reliable performance. Experiment result shows that the scale factor was 120Hz/g, measurement rang was ±50g with non-linearity coefficients of 19μg/g2 and 0.06μg/g3, resolution was 10μg/sqrt(Hz), bias Allan variance was 10μg." @default.
• W1566008596 created "2016-06-24" @default.
• W1566008596 creator A5029830698 @default.
• W1566008596 creator A5054042379 @default.
• W1566008596 creator A5060989854 @default.
• W1566008596 creator A5085194812 @default.
• W1566008596 date "2015-03-01" @default.
• W1566008596 modified "2023-09-23" @default.
• W1566008596 title "A wafer level vacuum packaged silicon vibration beam accelerometer" @default.
• W1566008596 cites W1499199063 @default.
• W1566008596 cites W1970601887 @default.
• W1566008596 cites W2045630735 @default.
• W1566008596 cites W2114181325 @default.
• W1566008596 cites W2140743003 @default.
• W1566008596 cites W2153450709 @default.
• W1566008596 cites W2219933160 @default.
• W1566008596 cites W2323295908 @default.
• W1566008596 doi "https://doi.org/10.1109/isiss.2015.7102378" @default.
• W1566008596 hasPublicationYear "2015" @default.
• W1566008596 type Work @default.
• W1566008596 sameAs 1566008596 @default.
• W1566008596 citedByCount "2" @default.
• W1566008596 countsByYear W15660085962016 @default.
• W1566008596 countsByYear W15660085962022 @default.
• W1566008596 crossrefType "proceedings-article" @default.
• W1566008596 hasAuthorship W1566008596A5029830698 @default.
• W1566008596 hasAuthorship W1566008596A5054042379 @default.
• W1566008596 hasAuthorship W1566008596A5060989854 @default.
• W1566008596 hasAuthorship W1566008596A5085194812 @default.
• W1566008596 hasConcept C105795698 @default.
• W1566008596 hasConcept C111919701 @default.
• W1566008596 hasConcept C117896860 @default.
• W1566008596 hasConcept C119599485 @default.
• W1566008596 hasConcept C120665830 @default.
• W1566008596 hasConcept C121332964 @default.
• W1566008596 hasConcept C127413603 @default.
• W1566008596 hasConcept C160671074 @default.
• W1566008596 hasConcept C168834538 @default.
• W1566008596 hasConcept C192562407 @default.
• W1566008596 hasConcept C198394728 @default.
• W1566008596 hasConcept C22679943 @default.
• W1566008596 hasConcept C24326235 @default.
• W1566008596 hasConcept C24890656 @default.
• W1566008596 hasConcept C2780288131 @default.
• W1566008596 hasConcept C33923547 @default.
• W1566008596 hasConcept C41008148 @default.
• W1566008596 hasConcept C49040817 @default.
• W1566008596 hasConcept C53143962 @default.
• W1566008596 hasConcept C544956773 @default.
• W1566008596 hasConcept C5722023 @default.
• W1566008596 hasConcept C74650414 @default.
• W1566008596 hasConcept C77170095 @default.
• W1566008596 hasConcept C89805583 @default.
• W1566008596 hasConceptScore W1566008596C105795698 @default.
• W1566008596 hasConceptScore W1566008596C111919701 @default.
• W1566008596 hasConceptScore W1566008596C117896860 @default.
• W1566008596 hasConceptScore W1566008596C119599485 @default.
• W1566008596 hasConceptScore W1566008596C120665830 @default.
• W1566008596 hasConceptScore W1566008596C121332964 @default.
• W1566008596 hasConceptScore W1566008596C127413603 @default.
• W1566008596 hasConceptScore W1566008596C160671074 @default.
• W1566008596 hasConceptScore W1566008596C168834538 @default.
• W1566008596 hasConceptScore W1566008596C192562407 @default.
• W1566008596 hasConceptScore W1566008596C198394728 @default.
• W1566008596 hasConceptScore W1566008596C22679943 @default.
• W1566008596 hasConceptScore W1566008596C24326235 @default.
• W1566008596 hasConceptScore W1566008596C24890656 @default.
• W1566008596 hasConceptScore W1566008596C2780288131 @default.
• W1566008596 hasConceptScore W1566008596C33923547 @default.
• W1566008596 hasConceptScore W1566008596C41008148 @default.
• W1566008596 hasConceptScore W1566008596C49040817 @default.
• W1566008596 hasConceptScore W1566008596C53143962 @default.
• W1566008596 hasConceptScore W1566008596C544956773 @default.
• W1566008596 hasConceptScore W1566008596C5722023 @default.
• W1566008596 hasConceptScore W1566008596C74650414 @default.
• W1566008596 hasConceptScore W1566008596C77170095 @default.
• W1566008596 hasConceptScore W1566008596C89805583 @default.
• W1566008596 hasLocation W15660085961 @default.
• W1566008596 hasOpenAccess W1566008596 @default.
• W1566008596 hasPrimaryLocation W15660085961 @default.
• W1566008596 hasRelatedWork W1630602315 @default.
• W1566008596 hasRelatedWork W1993381274 @default.
• W1566008596 hasRelatedWork W1993655752 @default.
• W1566008596 hasRelatedWork W2063290761 @default.
• W1566008596 hasRelatedWork W2066557332 @default.
• W1566008596 hasRelatedWork W2092492452 @default.
• W1566008596 hasRelatedWork W2096317584 @default.
• W1566008596 hasRelatedWork W2114535209 @default.
• W1566008596 hasRelatedWork W2116252297 @default.
• W1566008596 hasRelatedWork W2131525203 @default.
• W1566008596 hasRelatedWork W2142291705 @default.
• W1566008596 hasRelatedWork W2155161837 @default.
• W1566008596 hasRelatedWork W2348228157 @default.
• W1566008596 hasRelatedWork W2896409159 @default.
• W1566008596 hasRelatedWork W2947686483 @default.
• W1566008596 hasRelatedWork W2948851209 @default.
• W1566008596 hasRelatedWork W3021702439 @default.
• W1566008596 hasRelatedWork W3124378868 @default.
• W1566008596 hasRelatedWork W3210211269 @default.
• W1566008596 hasRelatedWork W2930221413 @default.

• next