Matches in SemOpenAlex for { <https://semopenalex.org/work/W1566572968> ?p ?o ?g. }
- W1566572968 endingPage "9" @default.
- W1566572968 startingPage "3" @default.
- W1566572968 abstract "This paper presents a comprehensive case study on electro-mechanical analysis of MEMS variable capacitors. Using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. The analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. A complete set of equations defining dynamic behavior of the MEMS, and an ac small signal equivalent circuit are presented. The mathematical models are defined and examined by the Matlab Simulink and a complete set of simulation results is reported for various cases separately. The results of this study would be useful in design and analysis of the MEMS based circuits which have some kind of mechanical dynamic action. Some examples of such devices may include VCOs, frequency modulators, tunable filters and parametric effect circuits." @default.
- W1566572968 created "2016-06-24" @default.
- W1566572968 creator A5003125139 @default.
- W1566572968 creator A5005288344 @default.
- W1566572968 creator A5017531099 @default.
- W1566572968 creator A5022946784 @default.
- W1566572968 date "2007-10-10" @default.
- W1566572968 modified "2023-09-28" @default.
- W1566572968 title "Comprehensive Electromechanical Analysis of MEMS Variable Gap Capacitors" @default.
- W1566572968 cites W1870286801 @default.
- W1566572968 cites W2099403416 @default.
- W1566572968 cites W2104977334 @default.
- W1566572968 cites W2141216130 @default.
- W1566572968 cites W2156992563 @default.
- W1566572968 cites W2157275109 @default.
- W1566572968 cites W2215711354 @default.
- W1566572968 cites W2545986972 @default.
- W1566572968 cites W282101752 @default.
- W1566572968 cites W564596744 @default.
- W1566572968 hasPublicationYear "2007" @default.
- W1566572968 type Work @default.
- W1566572968 sameAs 1566572968 @default.
- W1566572968 citedByCount "1" @default.
- W1566572968 countsByYear W15665729682013 @default.
- W1566572968 crossrefType "journal-article" @default.
- W1566572968 hasAuthorship W1566572968A5003125139 @default.
- W1566572968 hasAuthorship W1566572968A5005288344 @default.
- W1566572968 hasAuthorship W1566572968A5017531099 @default.
- W1566572968 hasAuthorship W1566572968A5022946784 @default.
- W1566572968 hasConcept C105795698 @default.
- W1566572968 hasConcept C111919701 @default.
- W1566572968 hasConcept C117251300 @default.
- W1566572968 hasConcept C119599485 @default.
- W1566572968 hasConcept C127413603 @default.
- W1566572968 hasConcept C134146338 @default.
- W1566572968 hasConcept C154945302 @default.
- W1566572968 hasConcept C165801399 @default.
- W1566572968 hasConcept C171496939 @default.
- W1566572968 hasConcept C192562407 @default.
- W1566572968 hasConcept C199360897 @default.
- W1566572968 hasConcept C23572009 @default.
- W1566572968 hasConcept C24326235 @default.
- W1566572968 hasConcept C2775924081 @default.
- W1566572968 hasConcept C2779843651 @default.
- W1566572968 hasConcept C2780365114 @default.
- W1566572968 hasConcept C32946077 @default.
- W1566572968 hasConcept C33923547 @default.
- W1566572968 hasConcept C37977207 @default.
- W1566572968 hasConcept C41008148 @default.
- W1566572968 hasConcept C47446073 @default.
- W1566572968 hasConcept C49040817 @default.
- W1566572968 hasConcept C52192207 @default.
- W1566572968 hasConceptScore W1566572968C105795698 @default.
- W1566572968 hasConceptScore W1566572968C111919701 @default.
- W1566572968 hasConceptScore W1566572968C117251300 @default.
- W1566572968 hasConceptScore W1566572968C119599485 @default.
- W1566572968 hasConceptScore W1566572968C127413603 @default.
- W1566572968 hasConceptScore W1566572968C134146338 @default.
- W1566572968 hasConceptScore W1566572968C154945302 @default.
- W1566572968 hasConceptScore W1566572968C165801399 @default.
- W1566572968 hasConceptScore W1566572968C171496939 @default.
- W1566572968 hasConceptScore W1566572968C192562407 @default.
- W1566572968 hasConceptScore W1566572968C199360897 @default.
- W1566572968 hasConceptScore W1566572968C23572009 @default.
- W1566572968 hasConceptScore W1566572968C24326235 @default.
- W1566572968 hasConceptScore W1566572968C2775924081 @default.
- W1566572968 hasConceptScore W1566572968C2779843651 @default.
- W1566572968 hasConceptScore W1566572968C2780365114 @default.
- W1566572968 hasConceptScore W1566572968C32946077 @default.
- W1566572968 hasConceptScore W1566572968C33923547 @default.
- W1566572968 hasConceptScore W1566572968C37977207 @default.
- W1566572968 hasConceptScore W1566572968C41008148 @default.
- W1566572968 hasConceptScore W1566572968C47446073 @default.
- W1566572968 hasConceptScore W1566572968C49040817 @default.
- W1566572968 hasConceptScore W1566572968C52192207 @default.
- W1566572968 hasIssue "2" @default.
- W1566572968 hasLocation W15665729681 @default.
- W1566572968 hasOpenAccess W1566572968 @default.
- W1566572968 hasPrimaryLocation W15665729681 @default.
- W1566572968 hasRelatedWork W1603754403 @default.
- W1566572968 hasRelatedWork W2092278041 @default.
- W1566572968 hasRelatedWork W2131731579 @default.
- W1566572968 hasRelatedWork W2332025771 @default.
- W1566572968 hasRelatedWork W2340948392 @default.
- W1566572968 hasRelatedWork W2389355527 @default.
- W1566572968 hasRelatedWork W2538088599 @default.
- W1566572968 hasRelatedWork W2575371494 @default.
- W1566572968 hasRelatedWork W2587892165 @default.
- W1566572968 hasRelatedWork W2590099916 @default.
- W1566572968 hasRelatedWork W2624224818 @default.
- W1566572968 hasRelatedWork W2753765858 @default.
- W1566572968 hasRelatedWork W2802940603 @default.
- W1566572968 hasRelatedWork W2901437523 @default.
- W1566572968 hasRelatedWork W2946047288 @default.
- W1566572968 hasRelatedWork W2947025028 @default.
- W1566572968 hasRelatedWork W2954654523 @default.
- W1566572968 hasRelatedWork W3118606571 @default.
- W1566572968 hasRelatedWork W3126688256 @default.