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• W1566608387 abstract "A new metal surface micromachining technology utilizing 3-D lithography, electroplating, and mechanical polishing has been developed to fabricate arbitrary 3-D metal microstructures as post-IC processes at low temperature below 120/spl deg/C. Using this technology, various highly-suspended 3-D microstructures have been successfully demonstrated for RF and microwave MEMS applications. We have fabricated spiral inductors suspended 100 /spl mu/m over the substrate, coplanar waveguides suspended 50 /spl mu/m over the substrate, and complicated micro-coaxial lines which have 50 /spl mu/m-suspended center signal lines surrounded by ground shields of 100 /spl mu/m in height." @default.
• W1566608387 created "2016-06-24" @default.
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• W1566608387 date "2003-06-25" @default.
• W1566608387 modified "2023-10-11" @default.
• W1566608387 title "3-D lithography and metal surface micromachining for RF and microwave MEMS" @default.
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• W1566608387 doi "https://doi.org/10.1109/memsys.2002.984360" @default.
• W1566608387 hasPublicationYear "2003" @default.
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