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- W1566779402 abstract "In this study, a novel bi-directional out-of-plane electrothermal actuator is designed and fabricated. Unlike the bi-metal and hot-cold arm thermal actuator, this actuator can move in two directions. Since the actuator consists of only a single layer thin film material, it can prevent delamination. According to the static load-deflection test, this actuator can achieve bi-directional actuation with amplitude near several microns when driven at 5 V. According to the vibration test, the dynamics of the actuator are influenced not only by the thermal characteristics but also by the vibration modes. Consequently, the thermal actuator still has a significant output when driven near 40 kHz. The actuator was subjected to a fatigue test which shows that its resonant frequency remains unchanged after 10/sup 9/ cycles of continuous operation with driving voltage at 2.25 V/sub pp/." @default.
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- W1566779402 date "2003-06-25" @default.
- W1566779402 modified "2023-10-16" @default.
- W1566779402 title "A novel single-layer bi-directional out-of-plane electrothermal microactuator" @default.
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- W1566779402 doi "https://doi.org/10.1109/memsys.2002.984365" @default.
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