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- W1567133493 abstract "Femtosecond Ti: sapphire laser was employed for ultrashallow junction formation in the dopant activation process. Activation of both p-type and n-type dopants were studied, and only very short diffusion length was observed after activation process." @default.
- W1567133493 created "2016-06-24" @default.
- W1567133493 creator A5009831954 @default.
- W1567133493 creator A5029301487 @default.
- W1567133493 creator A5030517073 @default.
- W1567133493 creator A5043197820 @default.
- W1567133493 creator A5056933461 @default.
- W1567133493 creator A5083025404 @default.
- W1567133493 date "2006-01-18" @default.
- W1567133493 modified "2023-10-18" @default.
- W1567133493 title "Near-Infrared Femtosecond Laser activation of shallow B and P doped layers" @default.
- W1567133493 cites W1971720353 @default.
- W1567133493 cites W1978833497 @default.
- W1567133493 cites W2032321140 @default.
- W1567133493 cites W2033089422 @default.
- W1567133493 cites W2040457996 @default.
- W1567133493 cites W2061795059 @default.
- W1567133493 cites W2089689839 @default.
- W1567133493 cites W2111644587 @default.
- W1567133493 doi "https://doi.org/10.1109/cleopr.2005.1569740" @default.
- W1567133493 hasPublicationYear "2006" @default.
- W1567133493 type Work @default.
- W1567133493 sameAs 1567133493 @default.
- W1567133493 citedByCount "0" @default.
- W1567133493 crossrefType "proceedings-article" @default.
- W1567133493 hasAuthorship W1567133493A5009831954 @default.
- W1567133493 hasAuthorship W1567133493A5029301487 @default.
- W1567133493 hasAuthorship W1567133493A5030517073 @default.
- W1567133493 hasAuthorship W1567133493A5043197820 @default.
- W1567133493 hasAuthorship W1567133493A5056933461 @default.
- W1567133493 hasAuthorship W1567133493A5083025404 @default.
- W1567133493 hasConcept C120665830 @default.
- W1567133493 hasConcept C121332964 @default.
- W1567133493 hasConcept C167735695 @default.
- W1567133493 hasConcept C191952053 @default.
- W1567133493 hasConcept C192562407 @default.
- W1567133493 hasConcept C2780064504 @default.
- W1567133493 hasConcept C2780081452 @default.
- W1567133493 hasConcept C49040817 @default.
- W1567133493 hasConcept C520434653 @default.
- W1567133493 hasConcept C57863236 @default.
- W1567133493 hasConceptScore W1567133493C120665830 @default.
- W1567133493 hasConceptScore W1567133493C121332964 @default.
- W1567133493 hasConceptScore W1567133493C167735695 @default.
- W1567133493 hasConceptScore W1567133493C191952053 @default.
- W1567133493 hasConceptScore W1567133493C192562407 @default.
- W1567133493 hasConceptScore W1567133493C2780064504 @default.
- W1567133493 hasConceptScore W1567133493C2780081452 @default.
- W1567133493 hasConceptScore W1567133493C49040817 @default.
- W1567133493 hasConceptScore W1567133493C520434653 @default.
- W1567133493 hasConceptScore W1567133493C57863236 @default.
- W1567133493 hasLocation W15671334931 @default.
- W1567133493 hasOpenAccess W1567133493 @default.
- W1567133493 hasPrimaryLocation W15671334931 @default.
- W1567133493 hasRelatedWork W1582809155 @default.
- W1567133493 hasRelatedWork W1602632142 @default.
- W1567133493 hasRelatedWork W1976427362 @default.
- W1567133493 hasRelatedWork W199428657 @default.
- W1567133493 hasRelatedWork W2001893906 @default.
- W1567133493 hasRelatedWork W2073906766 @default.
- W1567133493 hasRelatedWork W2086430358 @default.
- W1567133493 hasRelatedWork W2089051027 @default.
- W1567133493 hasRelatedWork W2109991108 @default.
- W1567133493 hasRelatedWork W2129877246 @default.
- W1567133493 hasRelatedWork W2146906712 @default.
- W1567133493 hasRelatedWork W2162045238 @default.
- W1567133493 hasRelatedWork W2326287172 @default.
- W1567133493 hasRelatedWork W2343879007 @default.
- W1567133493 hasRelatedWork W2602423142 @default.
- W1567133493 hasRelatedWork W2611329942 @default.
- W1567133493 hasRelatedWork W2987641159 @default.
- W1567133493 hasRelatedWork W3122675578 @default.
- W1567133493 hasRelatedWork W3155198454 @default.
- W1567133493 hasRelatedWork W588022126 @default.
- W1567133493 isParatext "false" @default.
- W1567133493 isRetracted "false" @default.
- W1567133493 magId "1567133493" @default.
- W1567133493 workType "article" @default.