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- W1567148924 abstract "We present the repeatability performance of an automated non-contact probe system for on-wafer device and integrated circuit characterization in the 500–750 GHz band. Unlike conventional contact-probe systems, a computer controlled x-y translation stage is employed to realize a completely automated non-contact probe setup. Thanks to this simplicity, far superior repeatability performance can be achieved with great ease. We present the repeatability study specifically for the 500–750 GHz band utilizing a precision servo system with 1 micron translation accuracy. At 625 GHz, our setup achieves 2.2° deviation in phase and 4.4%˙ deviation in magnitude for 25 successive measurements spanning over 1.5 hours. This fully computerized non-contact probe system also facilitates intermittent re-calibrations that are normally needed for reliable sub-mmW measurements." @default.
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- W1567148924 date "2015-05-01" @default.
- W1567148924 modified "2023-09-25" @default.
- W1567148924 title "Repeatability performance of non-contact probes in the 500–750GHz band" @default.
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- W1567148924 doi "https://doi.org/10.1109/arftg.2015.7162909" @default.
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