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- W1567165128 abstract "Summary form only given. In this paper we make use of both a fitted Power Spectral Density (PSD) function for an EUV system based on earlier published results and also an empirically derived PSD function over the spatial frequencies range from 5E-8 to 0. 1 (1/nm). From the radially symmetric PSD response a flare Point Spread Function (PSF/sub flare/) is constructed from which the impact on the aerial image can be directly computed through a convolution operation on the ideal aerial image without flare. It is shown that if the system PSD is stationary and the chrome density is uniform, the flare variation is essentially constant over the static exposure field except for distances several hundred microns from the edge of the exposure field. The main impact of flare is then a loss of overall aerial image contrast that can be significant, e.g. greatly exceeding 15% depending on mirror quality. The variation in critical dimension (CD) as a result of localized chrome density variation can be computed. We show that, through an iterative process, critical dimensions on the mask can be resized in a similar way to Optical Proximity Correction (OPC) to minimize the effects of flare on CD control." @default.
- W1567165128 created "2016-06-24" @default.
- W1567165128 creator A5006226460 @default.
- W1567165128 creator A5044576968 @default.
- W1567165128 creator A5076937568 @default.
- W1567165128 date "2002-11-13" @default.
- W1567165128 modified "2023-09-28" @default.
- W1567165128 title "Rigorous modeling of scattered light in EUV cameras" @default.
- W1567165128 doi "https://doi.org/10.1109/imnc.2001.984038" @default.
- W1567165128 hasPublicationYear "2002" @default.
- W1567165128 type Work @default.
- W1567165128 sameAs 1567165128 @default.
- W1567165128 citedByCount "0" @default.
- W1567165128 crossrefType "proceedings-article" @default.
- W1567165128 hasAuthorship W1567165128A5006226460 @default.
- W1567165128 hasAuthorship W1567165128A5044576968 @default.
- W1567165128 hasAuthorship W1567165128A5076937568 @default.
- W1567165128 hasConcept C105795698 @default.
- W1567165128 hasConcept C115961682 @default.
- W1567165128 hasConcept C120665830 @default.
- W1567165128 hasConcept C121332964 @default.
- W1567165128 hasConcept C154945302 @default.
- W1567165128 hasConcept C162996421 @default.
- W1567165128 hasConcept C168110828 @default.
- W1567165128 hasConcept C2776429412 @default.
- W1567165128 hasConcept C2779588948 @default.
- W1567165128 hasConcept C33923547 @default.
- W1567165128 hasConcept C41008148 @default.
- W1567165128 hasConcept C44870925 @default.
- W1567165128 hasConcept C45347329 @default.
- W1567165128 hasConcept C50644808 @default.
- W1567165128 hasConcept C69179731 @default.
- W1567165128 hasConceptScore W1567165128C105795698 @default.
- W1567165128 hasConceptScore W1567165128C115961682 @default.
- W1567165128 hasConceptScore W1567165128C120665830 @default.
- W1567165128 hasConceptScore W1567165128C121332964 @default.
- W1567165128 hasConceptScore W1567165128C154945302 @default.
- W1567165128 hasConceptScore W1567165128C162996421 @default.
- W1567165128 hasConceptScore W1567165128C168110828 @default.
- W1567165128 hasConceptScore W1567165128C2776429412 @default.
- W1567165128 hasConceptScore W1567165128C2779588948 @default.
- W1567165128 hasConceptScore W1567165128C33923547 @default.
- W1567165128 hasConceptScore W1567165128C41008148 @default.
- W1567165128 hasConceptScore W1567165128C44870925 @default.
- W1567165128 hasConceptScore W1567165128C45347329 @default.
- W1567165128 hasConceptScore W1567165128C50644808 @default.
- W1567165128 hasConceptScore W1567165128C69179731 @default.
- W1567165128 hasLocation W15671651281 @default.
- W1567165128 hasOpenAccess W1567165128 @default.
- W1567165128 hasPrimaryLocation W15671651281 @default.
- W1567165128 hasRelatedWork W1968380002 @default.
- W1567165128 hasRelatedWork W1973421753 @default.
- W1567165128 hasRelatedWork W1999900714 @default.
- W1567165128 hasRelatedWork W2002494869 @default.
- W1567165128 hasRelatedWork W2011903106 @default.
- W1567165128 hasRelatedWork W2039890107 @default.
- W1567165128 hasRelatedWork W2060833545 @default.
- W1567165128 hasRelatedWork W2063983429 @default.
- W1567165128 hasRelatedWork W2069731389 @default.
- W1567165128 hasRelatedWork W2071950847 @default.
- W1567165128 hasRelatedWork W2075191829 @default.
- W1567165128 hasRelatedWork W2080568958 @default.
- W1567165128 hasRelatedWork W2088697636 @default.
- W1567165128 hasRelatedWork W2089422525 @default.
- W1567165128 hasRelatedWork W2094637849 @default.
- W1567165128 hasRelatedWork W2106707981 @default.
- W1567165128 hasRelatedWork W2624459471 @default.
- W1567165128 hasRelatedWork W2779400605 @default.
- W1567165128 hasRelatedWork W2474846306 @default.
- W1567165128 hasRelatedWork W261384413 @default.
- W1567165128 isParatext "false" @default.
- W1567165128 isRetracted "false" @default.
- W1567165128 magId "1567165128" @default.
- W1567165128 workType "article" @default.