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• W1567169203 abstract "An extensive and complete experimental investigation with a full layout design of the channel direction was carried out for the first time to clarify the orientation dependence of germanium p-channel metal–oxide–semiconductor field-effect transistors(PMOSFETs). By comparison of gate trans-conductance, drive current, and hole mobility, we found that the performance trend with the substrate orientation for Ge PMOSFET is(110)>(111) ～(100), and the best channel direction is(110)/[110]. Moreover, the(110) device performance was found to be easily degraded as the channel direction got off from the [110] orientation, while(100) and(111) devices exhibited less channel orientation dependence. This experimental result shows good matching with the simulation reports to give a credible and significant guidance for Ge PMOSFET design." @default.
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• W1567169203 date "2014-01-01" @default.
• W1567169203 modified "2023-09-23" @default.
• W1567169203 title "Experimental clarification of orientation dependence of germanium PMOSFETs with Al2O3/GeOx/Ge gate stack" @default.
• W1567169203 hasPublicationYear "2014" @default.
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