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- W1567195147 abstract "A novel dual gate CMOS with low energy phosphorus/boron implantation and cobalt salicide is proposed. This technology suppresses boron penetration for pMOS, while maintaining high current drivability for nMOS with simple process steps. In addition, the drain junction capacitance of nMOS is drastically decreased, compared to a conventional MOSFET with arsenic source/drain. The delay time of CMOS ring oscillator was 28 ps, which is due to low junction capacitance and high current driving capability." @default.
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- W1567195147 date "2002-12-24" @default.
- W1567195147 modified "2023-09-27" @default.
- W1567195147 title "High speed 0.1 μm dual gate CMOS with low energy phosphorus/boron implantation and cobalt salicide" @default.
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