Matches in SemOpenAlex for { <https://semopenalex.org/work/W1567230244> ?p ?o ?g. }
- W1567230244 endingPage "5952" @default.
- W1567230244 startingPage "5945" @default.
- W1567230244 abstract "The interface of zirconium oxide thin films on silicon is analyzed in detail for their potential applications in the microelectronics. The formation of an interfacial layer of ZrSixOy with graded Zr concentration is observed by the x-ray photoelectron spectroscopy and secondary ion mass spectrometry analysis. The as-deposited ZrO2/ZrSixOy/Si sample is thermally stable up to 880 °C, but is less stable compared to the ZrO2/SiO2/Si samples. Post-deposition annealing in oxygen or ammonia improved the thermal stability of as-deposited ZrO2/ZrSixOy/Si to 925 °C, likely due to the oxidation/nitridation of the interface. The as-deposited film had an equivalent oxide thickness of ∼1.3 nm with a dielectric constant of ∼21 and a leakage current of 3.2×10−3 A/cm2 at −1.5 V. Upon oxygen or ammonia annealing, the formation of SiOx and SiHxNyOz at the interface reduced the overall dielectric constants." @default.
- W1567230244 created "2016-06-24" @default.
- W1567230244 creator A5002285746 @default.
- W1567230244 creator A5002293388 @default.
- W1567230244 creator A5016264159 @default.
- W1567230244 creator A5032960667 @default.
- W1567230244 creator A5033023422 @default.
- W1567230244 creator A5043844856 @default.
- W1567230244 creator A5046215434 @default.
- W1567230244 creator A5047263785 @default.
- W1567230244 creator A5049003157 @default.
- W1567230244 creator A5050769795 @default.
- W1567230244 creator A5055232584 @default.
- W1567230244 creator A5055392266 @default.
- W1567230244 creator A5058854043 @default.
- W1567230244 date "2003-05-09" @default.
- W1567230244 modified "2023-10-06" @default.
- W1567230244 title "Interfacial properties of ZrO2 on silicon" @default.
- W1567230244 cites W1506975141 @default.
- W1567230244 cites W1508018606 @default.
- W1567230244 cites W154577535 @default.
- W1567230244 cites W1555753450 @default.
- W1567230244 cites W1633087081 @default.
- W1567230244 cites W1970200102 @default.
- W1567230244 cites W1971285871 @default.
- W1567230244 cites W1977141058 @default.
- W1567230244 cites W1981247648 @default.
- W1567230244 cites W1982758916 @default.
- W1567230244 cites W1984057507 @default.
- W1567230244 cites W1992343392 @default.
- W1567230244 cites W1995383510 @default.
- W1567230244 cites W1998786034 @default.
- W1567230244 cites W2008449124 @default.
- W1567230244 cites W2010552632 @default.
- W1567230244 cites W2017520481 @default.
- W1567230244 cites W2022370378 @default.
- W1567230244 cites W2025762473 @default.
- W1567230244 cites W2029727758 @default.
- W1567230244 cites W2038059208 @default.
- W1567230244 cites W2038274823 @default.
- W1567230244 cites W2041155652 @default.
- W1567230244 cites W2041537608 @default.
- W1567230244 cites W2042799153 @default.
- W1567230244 cites W2068036292 @default.
- W1567230244 cites W2072451721 @default.
- W1567230244 cites W2078891375 @default.
- W1567230244 cites W2080011501 @default.
- W1567230244 cites W2091739606 @default.
- W1567230244 cites W2093657788 @default.
- W1567230244 cites W2118197415 @default.
- W1567230244 cites W2127549406 @default.
- W1567230244 cites W2166354192 @default.
- W1567230244 cites W2333844252 @default.
- W1567230244 doi "https://doi.org/10.1063/1.1563844" @default.
- W1567230244 hasPublicationYear "2003" @default.
- W1567230244 type Work @default.
- W1567230244 sameAs 1567230244 @default.
- W1567230244 citedByCount "63" @default.
- W1567230244 countsByYear W15672302442012 @default.
- W1567230244 countsByYear W15672302442013 @default.
- W1567230244 countsByYear W15672302442014 @default.
- W1567230244 countsByYear W15672302442015 @default.
- W1567230244 countsByYear W15672302442016 @default.
- W1567230244 countsByYear W15672302442017 @default.
- W1567230244 countsByYear W15672302442019 @default.
- W1567230244 countsByYear W15672302442020 @default.
- W1567230244 countsByYear W15672302442021 @default.
- W1567230244 countsByYear W15672302442022 @default.
- W1567230244 countsByYear W15672302442023 @default.
- W1567230244 crossrefType "journal-article" @default.
- W1567230244 hasAuthorship W1567230244A5002285746 @default.
- W1567230244 hasAuthorship W1567230244A5002293388 @default.
- W1567230244 hasAuthorship W1567230244A5016264159 @default.
- W1567230244 hasAuthorship W1567230244A5032960667 @default.
- W1567230244 hasAuthorship W1567230244A5033023422 @default.
- W1567230244 hasAuthorship W1567230244A5043844856 @default.
- W1567230244 hasAuthorship W1567230244A5046215434 @default.
- W1567230244 hasAuthorship W1567230244A5047263785 @default.
- W1567230244 hasAuthorship W1567230244A5049003157 @default.
- W1567230244 hasAuthorship W1567230244A5050769795 @default.
- W1567230244 hasAuthorship W1567230244A5055232584 @default.
- W1567230244 hasAuthorship W1567230244A5055392266 @default.
- W1567230244 hasAuthorship W1567230244A5058854043 @default.
- W1567230244 hasConcept C113196181 @default.
- W1567230244 hasConcept C121332964 @default.
- W1567230244 hasConcept C127413603 @default.
- W1567230244 hasConcept C133386390 @default.
- W1567230244 hasConcept C162356407 @default.
- W1567230244 hasConcept C165801399 @default.
- W1567230244 hasConcept C171250308 @default.
- W1567230244 hasConcept C172385210 @default.
- W1567230244 hasConcept C175708663 @default.
- W1567230244 hasConcept C178790620 @default.
- W1567230244 hasConcept C185592680 @default.
- W1567230244 hasConcept C187937830 @default.
- W1567230244 hasConcept C19067145 @default.
- W1567230244 hasConcept C191897082 @default.
- W1567230244 hasConcept C192562407 @default.