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- W1567487928 abstract "This paper addresses the characterization of MEMS structures, industrially manufactured using front-side bulk micro-machining post-process techniques on CMOS dies. The systematic characterization of mechanical parameters, such as stiffness or mass, on a set of 100 cantilever devices provides us with ground knowledge concerning process parameter variations. Taking into account the foundry-given process parameter spreading such as the layer thickness uncertainties characterization results are compared with simulation results obtained using Monte-Carlo analysis in standard CAD environment. This study can be considered as a first step in the development of a global monolithic MEMS design methodology." @default.
- W1567487928 created "2016-06-24" @default.
- W1567487928 creator A5000286237 @default.
- W1567487928 creator A5010752380 @default.
- W1567487928 creator A5011817646 @default.
- W1567487928 creator A5017919279 @default.
- W1567487928 creator A5054580128 @default.
- W1567487928 creator A5077942946 @default.
- W1567487928 creator A5078614919 @default.
- W1567487928 date "2002-01-01" @default.
- W1567487928 modified "2023-09-24" @default.
- W1567487928 title "Impact of Technology Spreading on MEMS design Robustness" @default.
- W1567487928 cites W2041844773 @default.
- W1567487928 doi "https://doi.org/10.1007/978-0-387-35597-9_21" @default.
- W1567487928 hasPublicationYear "2002" @default.
- W1567487928 type Work @default.
- W1567487928 sameAs 1567487928 @default.
- W1567487928 citedByCount "0" @default.
- W1567487928 crossrefType "book-chapter" @default.
- W1567487928 hasAuthorship W1567487928A5000286237 @default.
- W1567487928 hasAuthorship W1567487928A5010752380 @default.
- W1567487928 hasAuthorship W1567487928A5011817646 @default.
- W1567487928 hasAuthorship W1567487928A5017919279 @default.
- W1567487928 hasAuthorship W1567487928A5054580128 @default.
- W1567487928 hasAuthorship W1567487928A5077942946 @default.
- W1567487928 hasAuthorship W1567487928A5078614919 @default.
- W1567487928 hasBestOaLocation W15674879281 @default.
- W1567487928 hasConcept C104317684 @default.
- W1567487928 hasConcept C105795698 @default.
- W1567487928 hasConcept C127413603 @default.
- W1567487928 hasConcept C141354745 @default.
- W1567487928 hasConcept C171250308 @default.
- W1567487928 hasConcept C185592680 @default.
- W1567487928 hasConcept C192562407 @default.
- W1567487928 hasConcept C194789388 @default.
- W1567487928 hasConcept C19499675 @default.
- W1567487928 hasConcept C199639397 @default.
- W1567487928 hasConcept C24326235 @default.
- W1567487928 hasConcept C2779372316 @default.
- W1567487928 hasConcept C2780841128 @default.
- W1567487928 hasConcept C33923547 @default.
- W1567487928 hasConcept C34929307 @default.
- W1567487928 hasConcept C37977207 @default.
- W1567487928 hasConcept C41008148 @default.
- W1567487928 hasConcept C523214423 @default.
- W1567487928 hasConcept C55493867 @default.
- W1567487928 hasConcept C63479239 @default.
- W1567487928 hasConcept C66938386 @default.
- W1567487928 hasConcept C78519656 @default.
- W1567487928 hasConceptScore W1567487928C104317684 @default.
- W1567487928 hasConceptScore W1567487928C105795698 @default.
- W1567487928 hasConceptScore W1567487928C127413603 @default.
- W1567487928 hasConceptScore W1567487928C141354745 @default.
- W1567487928 hasConceptScore W1567487928C171250308 @default.
- W1567487928 hasConceptScore W1567487928C185592680 @default.
- W1567487928 hasConceptScore W1567487928C192562407 @default.
- W1567487928 hasConceptScore W1567487928C194789388 @default.
- W1567487928 hasConceptScore W1567487928C19499675 @default.
- W1567487928 hasConceptScore W1567487928C199639397 @default.
- W1567487928 hasConceptScore W1567487928C24326235 @default.
- W1567487928 hasConceptScore W1567487928C2779372316 @default.
- W1567487928 hasConceptScore W1567487928C2780841128 @default.
- W1567487928 hasConceptScore W1567487928C33923547 @default.
- W1567487928 hasConceptScore W1567487928C34929307 @default.
- W1567487928 hasConceptScore W1567487928C37977207 @default.
- W1567487928 hasConceptScore W1567487928C41008148 @default.
- W1567487928 hasConceptScore W1567487928C523214423 @default.
- W1567487928 hasConceptScore W1567487928C55493867 @default.
- W1567487928 hasConceptScore W1567487928C63479239 @default.
- W1567487928 hasConceptScore W1567487928C66938386 @default.
- W1567487928 hasConceptScore W1567487928C78519656 @default.
- W1567487928 hasLocation W15674879281 @default.
- W1567487928 hasOpenAccess W1567487928 @default.
- W1567487928 hasPrimaryLocation W15674879281 @default.
- W1567487928 hasRelatedWork W1677625238 @default.
- W1567487928 hasRelatedWork W2031814014 @default.
- W1567487928 hasRelatedWork W2035610421 @default.
- W1567487928 hasRelatedWork W2044635200 @default.
- W1567487928 hasRelatedWork W2070860660 @default.
- W1567487928 hasRelatedWork W2073201986 @default.
- W1567487928 hasRelatedWork W2140024806 @default.
- W1567487928 hasRelatedWork W2154615099 @default.
- W1567487928 hasRelatedWork W2158805037 @default.
- W1567487928 hasRelatedWork W2313016067 @default.
- W1567487928 hasRelatedWork W2349168251 @default.
- W1567487928 hasRelatedWork W2357785143 @default.
- W1567487928 hasRelatedWork W2365604923 @default.
- W1567487928 hasRelatedWork W2392634893 @default.
- W1567487928 hasRelatedWork W2765814628 @default.
- W1567487928 hasRelatedWork W2788492981 @default.
- W1567487928 hasRelatedWork W2912844040 @default.
- W1567487928 hasRelatedWork W3107139496 @default.
- W1567487928 hasRelatedWork W3139505317 @default.
- W1567487928 hasRelatedWork W3143869115 @default.
- W1567487928 isParatext "false" @default.
- W1567487928 isRetracted "false" @default.
- W1567487928 magId "1567487928" @default.
- W1567487928 workType "book-chapter" @default.