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- W1567492079 abstract "Improvement on photo current characteristics and crystallinity of Si thin film crystallized using BLDA was acquired successfully. Thin layer of a-Si was deposited on glass at room temperature. As a result of BLDA for the Si films, improvement of crystallinity was observed with the increase of laser power. Compared to micro-grain Si film produced at 4W, higher Iphoto/Idark ratio of 7.8 was obtained with the film treated at 6W. Multi-layer structure, which has been proposed, was simulated to assist and improve the poor absorption in red and IR light of thin poly-crystallized Si film. Significant increase in the light absorption in red and IR was obtained. BLDA is promising to next generation functional SoP technology with TFT photo-sensors." @default.
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- W1567492079 date "2013-07-02" @default.
- W1567492079 modified "2023-09-24" @default.
- W1567492079 title "Thin film photo-sensor by BLDA to realize system on panel" @default.
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