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- W1567872776 abstract "The influence of process was investigated on A-Si poly bump in this research, especially the density of poly bump was also studied to realize its characterization. This study showed that oxygen concentration has strong correlation with the bump density. In other word, the bump density increases as oxygen concentration increase. In order to reduce O/sub 2/ concentration, the following approach is described to verify it: 1) deposition pressure, 2) loading and unloading temperature, 3) loading area O/sub 2/ concentration - lower O2 concentration on loading area would get lowly bumps. In conclusion, the CP yield gained about 13% on Saliside product on well control a-poly process condition." @default.
- W1567872776 created "2016-06-24" @default.
- W1567872776 creator A5042688245 @default.
- W1567872776 creator A5044717531 @default.
- W1567872776 creator A5049242537 @default.
- W1567872776 creator A5050908586 @default.
- W1567872776 creator A5081391506 @default.
- W1567872776 date "2004-03-02" @default.
- W1567872776 modified "2023-09-27" @default.
- W1567872776 title "Improved 0.25 μm salicide yield via amorphous poly process optimizing" @default.
- W1567872776 cites W1971355847 @default.
- W1567872776 cites W1990496410 @default.
- W1567872776 cites W1998980458 @default.
- W1567872776 cites W2009184348 @default.
- W1567872776 cites W2020937363 @default.
- W1567872776 cites W2021916653 @default.
- W1567872776 cites W2096974410 @default.
- W1567872776 cites W2112102328 @default.
- W1567872776 doi "https://doi.org/10.1109/smtw.2002.1197413" @default.
- W1567872776 hasPublicationYear "2004" @default.
- W1567872776 type Work @default.
- W1567872776 sameAs 1567872776 @default.
- W1567872776 citedByCount "0" @default.
- W1567872776 crossrefType "proceedings-article" @default.
- W1567872776 hasAuthorship W1567872776A5042688245 @default.
- W1567872776 hasAuthorship W1567872776A5044717531 @default.
- W1567872776 hasAuthorship W1567872776A5049242537 @default.
- W1567872776 hasAuthorship W1567872776A5050908586 @default.
- W1567872776 hasAuthorship W1567872776A5081391506 @default.
- W1567872776 hasConcept C111919701 @default.
- W1567872776 hasConcept C113196181 @default.
- W1567872776 hasConcept C134121241 @default.
- W1567872776 hasConcept C151730666 @default.
- W1567872776 hasConcept C159985019 @default.
- W1567872776 hasConcept C173118649 @default.
- W1567872776 hasConcept C178790620 @default.
- W1567872776 hasConcept C185592680 @default.
- W1567872776 hasConcept C192562407 @default.
- W1567872776 hasConcept C2780901251 @default.
- W1567872776 hasConcept C2816523 @default.
- W1567872776 hasConcept C41008148 @default.
- W1567872776 hasConcept C43617362 @default.
- W1567872776 hasConcept C49040817 @default.
- W1567872776 hasConcept C540031477 @default.
- W1567872776 hasConcept C544956773 @default.
- W1567872776 hasConcept C56052488 @default.
- W1567872776 hasConcept C64297162 @default.
- W1567872776 hasConcept C8010536 @default.
- W1567872776 hasConcept C86803240 @default.
- W1567872776 hasConcept C89169090 @default.
- W1567872776 hasConcept C98045186 @default.
- W1567872776 hasConceptScore W1567872776C111919701 @default.
- W1567872776 hasConceptScore W1567872776C113196181 @default.
- W1567872776 hasConceptScore W1567872776C134121241 @default.
- W1567872776 hasConceptScore W1567872776C151730666 @default.
- W1567872776 hasConceptScore W1567872776C159985019 @default.
- W1567872776 hasConceptScore W1567872776C173118649 @default.
- W1567872776 hasConceptScore W1567872776C178790620 @default.
- W1567872776 hasConceptScore W1567872776C185592680 @default.
- W1567872776 hasConceptScore W1567872776C192562407 @default.
- W1567872776 hasConceptScore W1567872776C2780901251 @default.
- W1567872776 hasConceptScore W1567872776C2816523 @default.
- W1567872776 hasConceptScore W1567872776C41008148 @default.
- W1567872776 hasConceptScore W1567872776C43617362 @default.
- W1567872776 hasConceptScore W1567872776C49040817 @default.
- W1567872776 hasConceptScore W1567872776C540031477 @default.
- W1567872776 hasConceptScore W1567872776C544956773 @default.
- W1567872776 hasConceptScore W1567872776C56052488 @default.
- W1567872776 hasConceptScore W1567872776C64297162 @default.
- W1567872776 hasConceptScore W1567872776C8010536 @default.
- W1567872776 hasConceptScore W1567872776C86803240 @default.
- W1567872776 hasConceptScore W1567872776C89169090 @default.
- W1567872776 hasConceptScore W1567872776C98045186 @default.
- W1567872776 hasLocation W15678727761 @default.
- W1567872776 hasOpenAccess W1567872776 @default.
- W1567872776 hasPrimaryLocation W15678727761 @default.
- W1567872776 hasRelatedWork W1972555106 @default.
- W1567872776 hasRelatedWork W1974949857 @default.
- W1567872776 hasRelatedWork W1982154659 @default.
- W1567872776 hasRelatedWork W2006772523 @default.
- W1567872776 hasRelatedWork W2015162477 @default.
- W1567872776 hasRelatedWork W2021213815 @default.
- W1567872776 hasRelatedWork W2024685241 @default.
- W1567872776 hasRelatedWork W2048580361 @default.
- W1567872776 hasRelatedWork W2051751193 @default.
- W1567872776 hasRelatedWork W2055512418 @default.
- W1567872776 hasRelatedWork W2072776329 @default.
- W1567872776 hasRelatedWork W2086209573 @default.
- W1567872776 hasRelatedWork W2107296508 @default.
- W1567872776 hasRelatedWork W2170889263 @default.
- W1567872776 hasRelatedWork W2210718363 @default.
- W1567872776 hasRelatedWork W2402624033 @default.
- W1567872776 hasRelatedWork W2463849237 @default.
- W1567872776 hasRelatedWork W2966074537 @default.
- W1567872776 hasRelatedWork W3026110922 @default.
- W1567872776 hasRelatedWork W810014306 @default.
- W1567872776 isParatext "false" @default.
- W1567872776 isRetracted "false" @default.
- W1567872776 magId "1567872776" @default.
- W1567872776 workType "article" @default.