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- W1568740440 abstract "We report on high performance transistors using a new recessed channel formed by plasma oxidation and etching method (RC-POEM). The advantages of RC-POEM are: [a] lowering source/drain extension sheet resistance while suppressing lateral diffusion of extension region; [b] forming pseudo-raised extension using only plasma oxidation and wet etching. RC-POEM suppressed short channel effects down to 35nm physical gate length and high drive current were obtained." @default.
- W1568740440 created "2016-06-24" @default.
- W1568740440 creator A5015909183 @default.
- W1568740440 creator A5038848973 @default.
- W1568740440 creator A5041779132 @default.
- W1568740440 creator A5058552434 @default.
- W1568740440 creator A5071099506 @default.
- W1568740440 creator A5069686449 @default.
- W1568740440 date "2003-06-26" @default.
- W1568740440 modified "2023-09-26" @default.
- W1568740440 title "High performance damascene gate CMOSFETs with recessed channel formed by plasma oxidation and etching method (RC-POEM)" @default.
- W1568740440 cites W1553039458 @default.
- W1568740440 cites W1828245806 @default.
- W1568740440 cites W1991488242 @default.
- W1568740440 cites W2107129965 @default.
- W1568740440 cites W2109907355 @default.
- W1568740440 cites W2128919271 @default.
- W1568740440 cites W2157881933 @default.
- W1568740440 doi "https://doi.org/10.1109/iedm.2002.1175874" @default.
- W1568740440 hasPublicationYear "2003" @default.
- W1568740440 type Work @default.
- W1568740440 sameAs 1568740440 @default.
- W1568740440 citedByCount "1" @default.
- W1568740440 crossrefType "proceedings-article" @default.
- W1568740440 hasAuthorship W1568740440A5015909183 @default.
- W1568740440 hasAuthorship W1568740440A5038848973 @default.
- W1568740440 hasAuthorship W1568740440A5041779132 @default.
- W1568740440 hasAuthorship W1568740440A5058552434 @default.
- W1568740440 hasAuthorship W1568740440A5069686449 @default.
- W1568740440 hasAuthorship W1568740440A5071099506 @default.
- W1568740440 hasConcept C100460472 @default.
- W1568740440 hasConcept C107187091 @default.
- W1568740440 hasConcept C116372231 @default.
- W1568740440 hasConcept C119599485 @default.
- W1568740440 hasConcept C121332964 @default.
- W1568740440 hasConcept C127413603 @default.
- W1568740440 hasConcept C130472188 @default.
- W1568740440 hasConcept C133386390 @default.
- W1568740440 hasConcept C159985019 @default.
- W1568740440 hasConcept C165801399 @default.
- W1568740440 hasConcept C172385210 @default.
- W1568740440 hasConcept C192562407 @default.
- W1568740440 hasConcept C24326235 @default.
- W1568740440 hasConcept C2779227376 @default.
- W1568740440 hasConcept C49040817 @default.
- W1568740440 hasConcept C62520636 @default.
- W1568740440 hasConcept C66825105 @default.
- W1568740440 hasConcept C69357855 @default.
- W1568740440 hasConcept C82706917 @default.
- W1568740440 hasConcept C97355855 @default.
- W1568740440 hasConceptScore W1568740440C100460472 @default.
- W1568740440 hasConceptScore W1568740440C107187091 @default.
- W1568740440 hasConceptScore W1568740440C116372231 @default.
- W1568740440 hasConceptScore W1568740440C119599485 @default.
- W1568740440 hasConceptScore W1568740440C121332964 @default.
- W1568740440 hasConceptScore W1568740440C127413603 @default.
- W1568740440 hasConceptScore W1568740440C130472188 @default.
- W1568740440 hasConceptScore W1568740440C133386390 @default.
- W1568740440 hasConceptScore W1568740440C159985019 @default.
- W1568740440 hasConceptScore W1568740440C165801399 @default.
- W1568740440 hasConceptScore W1568740440C172385210 @default.
- W1568740440 hasConceptScore W1568740440C192562407 @default.
- W1568740440 hasConceptScore W1568740440C24326235 @default.
- W1568740440 hasConceptScore W1568740440C2779227376 @default.
- W1568740440 hasConceptScore W1568740440C49040817 @default.
- W1568740440 hasConceptScore W1568740440C62520636 @default.
- W1568740440 hasConceptScore W1568740440C66825105 @default.
- W1568740440 hasConceptScore W1568740440C69357855 @default.
- W1568740440 hasConceptScore W1568740440C82706917 @default.
- W1568740440 hasConceptScore W1568740440C97355855 @default.
- W1568740440 hasLocation W15687404401 @default.
- W1568740440 hasOpenAccess W1568740440 @default.
- W1568740440 hasPrimaryLocation W15687404401 @default.
- W1568740440 hasRelatedWork W1533315808 @default.
- W1568740440 hasRelatedWork W1565525930 @default.
- W1568740440 hasRelatedWork W1962614668 @default.
- W1568740440 hasRelatedWork W1967426772 @default.
- W1568740440 hasRelatedWork W1976769231 @default.
- W1568740440 hasRelatedWork W1988279276 @default.
- W1568740440 hasRelatedWork W2011877463 @default.
- W1568740440 hasRelatedWork W2061749367 @default.
- W1568740440 hasRelatedWork W2071712090 @default.
- W1568740440 hasRelatedWork W2072846659 @default.
- W1568740440 hasRelatedWork W2138507333 @default.
- W1568740440 hasRelatedWork W2141648352 @default.
- W1568740440 hasRelatedWork W2158733747 @default.
- W1568740440 hasRelatedWork W2167843682 @default.
- W1568740440 hasRelatedWork W2280637707 @default.
- W1568740440 hasRelatedWork W2507916585 @default.
- W1568740440 hasRelatedWork W2545176521 @default.
- W1568740440 hasRelatedWork W2737322747 @default.
- W1568740440 hasRelatedWork W2797831871 @default.
- W1568740440 hasRelatedWork W2840045691 @default.
- W1568740440 isParatext "false" @default.
- W1568740440 isRetracted "false" @default.
- W1568740440 magId "1568740440" @default.
- W1568740440 workType "article" @default.